STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 96
5
SERIAL COMMUNICATION PROTOCOL
Error message Value Error message Value
[System reservation] 0 AMB Com. Failure 33
[System reservation] 1 [System reservation] 34
[System reservation] 2 [System reservation] 35
[System reservation] 3 [System reservation] 36
[System reservation] 4 [System reservation] 37
Power Failure 5 [System reservation] 38
Power Supply Fail 6 [System reservation] 39
Overspeed 1 7 [System reservation] 40
DRV Overvoltage 8 [System reservation] 41
[System reservation] 9 [System reservation] 42
CNT Overheat 1 10 WARNING: Imbalance X_H 43
*1
DRV Overcurrent 11 WARNING: Imbalance X_B 44
*1
DRV Overload 12 WARNING: Imbalance Z 45
*1
Disturbance X_H 13 [System reservation] 46
Disturbance Y_H 14 [System reservation] 47
Disturbance X_B 15 [System reservation] 48
Disturbance Y_B 16 [System reservation] 49
Disturbance Z 17 DRV Failure 50
MOTOR Overheat 18 [System reservation] 51
[System reservation] 19 [System reservation] 52
CNT Overheat 2 20 [System reservation] 53
[System reservation] 21 [System reservation] 54
[System reservation] 22 [System reservation] 55
[System reservation] 23 [System reservation] 56
DRV Com. Failure 24 [System reservation] 57
WARNING: 1
st
Damage Limit
25
*1
[System reservation] 58
WARNING: 2
nd
Damage Limit
26
*1
Acc Mafunction 59
START NOT ALLOWED 27 [System reservation] 60
Speed Pulse Lost 28 [System reservation] 61
Overspeed 2 29 [System reservation] 62
Overspeed 3 30 [System reservation] 63
M_Temp Lost 31 [System reservation] 64
[System reservation] 32 [System reservation] 65
Table 27 - Error message values
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