Edwards STP-iX457 Series User Manual

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 46
INSTALLATION
3
3.8.1 Vacuum piping method
1. Attach the inlet port to the high vacuum side.
(Refer to Section 2.1, "STP pump specification" for maximum working pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to Section 2.1, "STP pump specification" for allowable backing pressure).
3.9 Introducing N
2
gas (for the STP pump equipped with purge port)
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
2
gas or other gas
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N
2
, introduce a dry N
2
gas through the electromagnetic vent. valve, needle valve or similar
valve (must be prepared by the customer) from the purge port.
For instructions on how to introduce the purge gas, see Section 4.1.2.
h Height of purge port
STP-iX457 series STP-iXU457 series
Inlet port
flange
VG150 / ISO160
ISO160F / ICF203
VG100 / ISO100
ISO100F / ICF152
ISO160
ISO160F
VG150
ISO100F
ICF152
ICF203 VG100 ISO100
h 177 207 228 258 250 227 242
Figure 33 - Height of purge port
h

Edwards STP-iX457 Series Specifications

General

Brand	Edwards
Model	STP-iX457 Series
Category	Water Pump
Language	English