Edwards STP-iX457 Series - Example of a Control Method

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 43
INSTALLATION
3
Figure 32 - Example of a control method when introducing the atmosphere (in dashed line)
Note: The atmosphere or dry N
2
gas introduction at the vent valve may result in a noise. This is not
abnormality/error.