STP Series Turbomolecular Pump
MAINTENANCE AND INSPECTION
6 MAINTENANCE AND INSPECTION
6.1 Maintenance and inspection
WARNING
When performing maintenance and inspections of the STP pump, exhaust gases
inside the STP pump thoroughly. Residual gases may cause an accident when
removing the STP pump. To prevent an accident, confirm the characteristics of
gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier. Wear personal protective clothing if necessary.
WARNING
Before carrying out any maintenance or inspections on the STP pump and/or the
control unit, power off the primary power (turn the MAIN POWER "OFF"), confirm
that the LED and LCD are extinguished, and then isolate (Lockout/Tagout) the
electrical energy source, water and gas, and other energy sources on the vacuum
equipment. Failure to do so may result in the inadvertent rotation of the STP pump
which may result in an accident, an electric shock or damage to equipment.
Moreover, an accident caused by water leaks or gas leak may occur.
WARNING
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric
shock or the failure.
WARNING
The wipes used for clean and decontamination might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
CAUTION
DO NOT touch any place other those specified when performing maintenance or inspecting the
pump and NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipments before performing maintenance and inspections.
Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact
Service office.
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