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Edwards STP-A3503 Series User Manual

Edwards STP-A3503 Series
63 pages
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MT-00E-001-M
D
Applicable Models:
STP-301/451 series
STP-L301/L451 series
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
STP-A2203 series
STP-A2503/A3003 series
STP-A2803/A3503 series
STP-F2203 series
STP-XH2603P/XH3203P series
STP-XA2703/XA3203 series
STP-XA4503 series
STP-XW3503 series
STP Series Turbomolecular Pumps
Generic Instruction Manual
Instruction Manual (A)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
2023.08

Table of Contents

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Edwards STP-A3503 Series Specifications

General IconGeneral
ModelSTP-A3503 Series
TypeTurbomolecular Pump
Pumping Speed3500 l/s (N2)
Ultimate Pressure≤1 x 10-8 Pa (after baking)
Cooling MethodWater

Summary

Introduction

Precautions for safe operation

Important safety measures to follow during STP pump operation.

Installation of the STP Pump

Precautions before installation

Safety guidelines and prerequisites before installing the pump.

How to install the STP pump

Step-by-step instructions for installing the STP pump.

Secure the STP pump

Procedures for securely mounting the STP pump to equipment.

Precautions of vacuum piping

Important considerations for vacuum piping connections to the STP pump.

Vacuum piping method

Recommended methods for connecting vacuum piping to the STP pump.

Installation of the STP Control Unit

STP control unit

Overview of the STP control unit and its functions.

Operation

Before starting the STP pump

Initial checks and procedures before operating the STP pump.

Pump operation

Procedures for operating the STP pump, including start/stop.

Starting the STP pump after a safety function operates

How to restart the pump after a safety function has been triggered.

Gas pumping, cooling and baking the STP pump

Procedures for gas pumping, cooling, and baking operations.

Cooling the STP pump

Detailed methods and precautions for cooling the STP pump.

Safety Functions

Safety functions

Overview of the STP pump's safety functions and error handling.

Operation after a power recovery

How to operate the pump after a power interruption and recovery.

Maintenance and Inspection

Maintenance and inspection precautions

Safety precautions for maintenance and inspection activities.

Maintenance

General maintenance guidelines and schedules.

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