Edwards STP-A1303 Series - 6.4.3 Recommended Maintenance Intervals for Main Parts

STP Series Turbomolecular Pump
MT-00E-001-M
Page 50
MAINTENANCE AND INSPECTION
6
6.4.3 Recommended maintenance intervals for main parts
Internal components of the STP pump will be damaged from gas load, heat, and corrosion when
used long-term. Deterioration or abrasion of the main parts of the STP pump will cause unexpected
failures. When overhauling the STP pump, replacement of main parts are recommended. Refer to
the following list as recommended maintenance intervals for main parts.
Main part name
Recommended maintenance intervals
*1
When using corrosive
gas
When not using
corrosive gas
Rotor blades
3 years
5 years
Rotor blades
(High radiation coating specification)
3 years
5 years
Rotor shaft
3 years
5 years
Motor, Magnetic bearing unit
5 years
7 years
Vacuum connector
5 years
7 years
Temperature sensor (vacuum side)
3 years
5 years
Air-cooling fan
5 years
PCBA in the control unit
7 years
Accessories
TMS valve
3 years
TMS heater
Outlet port heater
3 years
Connection cable
5 years
*1: Maintenance intervals of any parts may be shortened depending on the condition of use.
The costs of replacing parts that need to be replaced when deterioration or abrasion is observed will
be at the customers charge, even though a period is not exceeding the recommended maintenance
intervals.
When overhaul of the STP pump is needed, contact Service office.