Edwards AIGX-S-NW25 User Manual

D048-50-880 Issue E
Page 12 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
OPERATION
Figure 4 - Pressure Output Signal of AIGX
4.2.1 Calibration in Different Gases
The equation given in Section 4.2 is for air or nitrogen only. For other gases, the indicated pressure has to be
multiplied by a gas calibration factor (GCF).
The following table lists the gas calibration factor for most commonly used gases.
Table 3 - Gas Calibration Factors for Various Gases
Gas GCF
Helium 5.7
Argon 0.75
Neon 3.3
Krypton 0.5
Xenon 0.35
Hydrogen 2.4
Oxygen 1
Carbon Monoxide 1.15
Carbon Dioxide 0.7
0
1
2
3
4
5
6
7
8
1E-10 1E-9 1E-8 1E-7 1E-6 1E-5 1E-4 1E-3 1E-2 1E-1 1E+0 1E+1
Indicated Pressure
Gauge output (volts)
mbar
torr
Pascal

Edwards AIGX-S-NW25 Specifications

General

Brand	Edwards
Model	AIGX-S-NW25
Category	Controller
Language	English