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Edwards EXC 100E User Manual

Edwards EXC 100E
42 pages
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D396-20-880
Issue H
Original Instructions
Instruction Manual
EXC100E and EXC100L Turbomolecular
Pump Controllers
Description Item Number
EXC100E Turbomolecular Pump Controller D396-20-000
EXC100L Turbomolecular Pump Controller D396-22-000

Table of Contents

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Edwards EXC 100E Specifications

General IconGeneral
BrandEdwards
ModelEXC 100E
CategoryController
LanguageEnglish

Summary

Introduction to EXC Controllers

Scope and Definitions

Manual scope, definitions of warnings, and cautionary notes.

Controller Description

Details the EXC Controller's function, power supply, and key features.

Active Gauge Connection

How to connect AIM gauges or others via the logic interface.

Technical Data and Specifications

Operating and Storage Conditions

Specifies ambient temperature, humidity, and altitude limits for operation.

Mechanical Specifications

Provides dimensions, mass, enclosure protection, and pollution degree.

Electrical Data

Details voltage, frequency, input power, and fuse ratings.

Logic Interface Details

Defines signals, voltage, and current for the logic interface.

Factory Settings

Outlines default configurations for speed, timer, and outputs.

Electrical Connectors

Specifies connector types for power, gauge, and logic interface.

Installation Procedures

Unpack and Inspect Controller

Instructions for checking and handling the controller upon receipt.

Configure the Controller

Details how to set up the controller using internal configuration links.

Fit the Controller

Guidelines for physically mounting the controller for proper operation.

Controller Electrical Connections

Overview of electrical connections and logic interface pinouts.

Connect the Electrical Supply

Procedure for connecting the main power supply to the controller.

Connect the EXT Pump

Instructions for connecting the controller to the EXT pump.

Connect Logic Interface

Connecting the controller to external control systems and equipment.

Adjust Normal Speed

Procedure for adjusting the speed at which 'Normal' status is indicated.

Adjust Internal Timer

Procedure for adjusting the duration of the internal timer for fail conditions.

Operation of the EXC Controller

System Start-up

Step-by-step procedure for starting the pumping system.

Standby Mode

How to place the controller and pump into standby mode.

High Inlet Pressure Operation

How the controller manages high inlet pressure conditions.

High Pump Temperature Operation

How the controller handles high pump temperature.

Normal System Shutdown

Procedure for safely shutting down the pumping system.

Automatic Shutdown After Fail

How the controller reacts and shuts down during a fail condition.

Reset Controller After Fail

Steps required to reset the controller after a fault.

Electrical Supply Failure

Controller behavior and shutdown during electrical supply interruptions.

Maintenance and Troubleshooting

Maintenance Safety Precautions

Critical safety instructions and precautions for performing maintenance.

Replace a Fuse

Step-by-step procedure for replacing blown fuses in the controller.

Clean the Controller

Instructions for cleaning the controller's exterior and interior surfaces.

Fault Finding Guide

Guidance on diagnosing and resolving system faults and errors.

Storage and Disposal

Storage Recommendations

Guidelines for storing the controller in suitable conditions.

Safe Disposal Procedures

Procedures for safe and compliant disposal of the controller.

Service and Accessories

Introduction to Service & Parts

Information on ordering spare parts and locating service centers.

Available Service Options

Details on equipment decontamination, exchange, repair, and testing.

Electrical Supply Cable

Details and item number for the required electrical supply cable.

Pump-to-Controller Cable

Available cables for connecting the controller to the EXT pump.

BX Bakeout Band

Information on the BX bakeout band accessory for pump degassing.

Active Vacuum Gauges

List of compatible active vacuum gauges connectable to the controller.

Engineering Diagrams

Controller to EXT Pump Connections Diagram

Diagram showing electrical connections between the controller and EXT pump.

Active Gauge Connector Pinout

Pinout diagram for the active gauge connector on the controller.

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