EasyManua.ls Logo

Edwards EXC 100E

Edwards EXC 100E
42 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
© Edwards Limited 2015. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
D396-20-880 Issue H
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 2
1.3 Connection of an Active Gauge ........................................................................................ 2
1.4 Logic interface ........................................................................................................... 3
1.4.1 Introduction ..............................................................................................................3
1.4.2 Electrical supplies .......................................................................................................3
1.4.3 Control inputs ............................................................................................................3
1.4.4 Status outputs ............................................................................................................4
1.4.5 Analogue output ......................................................................................................... 4
1.5 Vent-valve control ....................................................................................................... 4
1.5.1 Introduction ..............................................................................................................4
1.5.2 Vent on Stop ..............................................................................................................5
1.5.3 Vent on Fail ............................................................................................................... 5
1.6 Controller Fail conditions ............................................................................................... 5
1.6.1 General .................................................................................................................... 5
1.6.2 Internal Timer ............................................................................................................6
2 Technical data ....................................................................................9
2.1 Operating and storage conditions ..................................................................................... 9
2.2 Mechanical data .......................................................................................................... 9
2.3 Electrical data ............................................................................................................ 9
2.4 EXT pump electrical output data .....................................................................................10
2.5 Logic interface ..........................................................................................................10
2.6 Factory settings .........................................................................................................11
2.7 Electrical connectors ...................................................................................................11
3 Installation ....................................................................................... 13
3.1 Unpack and inspect .....................................................................................................13
3.2 Configure the Controller ...............................................................................................13
3.2.1 Introduction .............................................................................................................13
3.2.2 Select speed or power analogue output .............................................................................13
3.2.3 Enable/disable the Internal Timer to monitor low pump speed .................................................14
3.2.4 Vent options .............................................................................................................14
3.3 Fit the Controller .......................................................................................................16
3.4 Introduction to Controller electrical connections .................................................................16
3.5 Connect the electrical supply .........................................................................................18
3.6 Connect additional earth (ground) bonding (if required) .........................................................18
3.7 Connect the EXT pump .................................................................................................18
3.8 Connect an AIM Active Inverted Magnetron gauge (optional) ....................................................19
3.9 Connect the logic interface to your equipment ....................................................................19
3.9.1 Introduction .............................................................................................................19
3.9.2 Connect a vacuum gauge to the logic interface ...................................................................19
3.10 Adjust the Normal speed ..............................................................................................20
3.11 Adjust the Internal Timer .............................................................................................20
4 Operation ........................................................................................ 23
4.1 Start-up ..................................................................................................................23
4.2 Standby ...................................................................................................................23
4.3 Operation with high inlet pressure ...................................................................................23
4.4 Operation with high pump temperature ............................................................................23
dcs/7692/07/15

Table of Contents

Related product manuals