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Edwards EXC120 User Manual

Edwards EXC120
54 pages
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D396-14-880
Issue J Original
Instruction Manual
EXC Turbomolecular Pump Controllers
Description Item Number
EXC120 Controller D396-16-000
EXC120E Controller D396-17-000
EXC300 Controller D396-14-000
EXC300M Controller D396-15-000

Table of Contents

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Edwards EXC120 Specifications

General IconGeneral
ModelEXC120
TypeController
ManufacturerEdwards
CompatibilityEdwards Vacuum Pumps and Instruments
Output ChannelsMultiple (Relay and Analog)

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