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Introduction
D396-20-880 Issue H
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the EXC100E and EXC100L
Turbomolecular Pump Controllers. You must use the Controller as specified in this manual.
Read this manual before you install and operate the Controller. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
The units used throughout this manual conform to the SI international system of units of measurement.
The following warning symbols appear on the Controller:
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Protective conductor terminal.
Direct current only.
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