Edwards EXT70H Series User Manual

B722-20-880 Issue D
Page 10 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Inlet pumping
speed
N
2
†
‡
65 l s
-1
71 l s
-1
65 l s
-1
52 l s
-1
Pb < 5 mbar (500Pa),
Qi < 100 sccm (1.68
mbar l s
-1
, 168 Pa l s
-1
)
He
† ‡
60 l s
-1
62 l s
-1
60 l s
-1
53 l s
-1
Pb < 5 mbar (500 Pa)
Qi = 0
H
2
†
‡
50 l s
-1
51 l s
-1
50 l s
-1
46 l s
-1
Pb < 2 mbar (200 Pa)
Qi = 0
Inlet compression
ratio
N
2
‡
> 1 x 10
8
> 1 x 10
8
> 1 x 10
8
> 1 x 10
8
Pb < 10 mbar
(1000 Pa)
He
‡
4 x 10
5
4 x 10
5
4 x 10
5
4 x 10
5
Pb < 3 mbar (300 Pa)
H
2
‡
3 x 10
4
3 x 10
4
3 x 10
4
3 x 10
4
Pb < 1 mbar (100 Pa)
Interstage pumping
speed
†
N
2
‡
6 l s
-1
- - - Pb = 5 mbar (500 Pa)
Qi = 100 sccm (1.69
mbar l s
-1
, 169 Pa l s
-1
)
Qp = 0 sccm
Ultimate pressure
with rotary vane
backing pump:
**
< 5 x 10
-9
mbar
< 5 x 10
-7
Pa
< 5 x 10
-9
mbar
< 5 x 10
-7
Pa
< 5 x 10
-10
mbar
< 5 x 10
-8
Pa
< 5 x 10
-9
mbar
< 5 x 10
-7
Pa
with diaphragm
backing pump:
††
< 5 x 10
-8
mbar
< 5 x 10
-6
Pa
< 5 x 10
-8
mbar
< 5 x 10
-6
Pa
< 5 x 10
-9
mbar
< 5 x 10
-7
Pa
< 5 x 10
-8
mbar
< 5 x 10
-6
Pa
Maximum backing
pressure
‡‡
N
2
12 mbar
1.2 x 10
2
Pa
12 mbar
1.2 x 10
2
Pa
12 mbar
1.2 x 10
2
Pa
12 mbar
1.2 x 10
2
Pa
He 8 mbar
8 x 10
1
Pa
8 mbar
8 x 10
1
Pa
8 mbar
8 x 10
1
Pa
8 mbar
8 x 10
1
Pa
H
2
2.5 mbar
2.5 x 10
2
Pa
2.5 mbar
2.5 x 10
2
Pa
2.5 mbar
2.5 x 10
2
Pa
2.5 mbar
2.5 x 10
2
Pa
Minimum backing
pump displacement
0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
Maximum
continuous inlet
pressure
***
Nitrogen:
water cooling
(water at
15 °C, 40°C
ambient)
***
2 x 10
-2
mbar
(2 Pa)
2 x 10
-2
mbar
(2 Pa)
2 x 10
-2
mbar
(2 Pa)
2 x 10
-2
mbar
(2 Pa)
air cooling at
35 °C
***
1 x 10
-2
mbar
(1 Pa)
1 x 10
-2
mbar
(1 Pa)
1 x 10
-2
mbar
(1 Pa)
1 x 10
-2
mbar
(1 Pa)
Table 1 - EXT 70H 24 V / EXT 70Hi 24 V technical data (continued)
Parameter
EXT70H/ISO63
24 V
EXT70H/
ISO100 24 V
EXT70H/63CF
24 V
EXT70H/NW40
24 V
Notes

Edwards EXT70H Series Specifications

General

Brand	Edwards
Model	EXT70H Series
Category	Water Pump
Language	English