Edwards EXT75DX - Page 17

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Technical data
B722-40-880 Issue F
Interstage pumping speed, for interstage
DX pumps with N
2
(DN16NW port)
70 sccm flow through interstage port 10 l s
-1
---
5 sccm flow through interstage port 3 l s
-1
---
Interstage pumping speed, for
N
2
----
He ----
Ultimate pressure:
with rotary vane backing pump:
*
<5 x 10
-9
mbar <5 x 10
-10
mbar <5 x 10
-9
mbar <5 x 10
-9
mbar
with diaphragm backing pump:
†
<5 x 10
-8
mbar <5 x 10
-9
mbar <5 x 10
-8
mbar <5 x 10
-8
mbar
*
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing pump.
†
Ultimate pressure 48 hours after bakeout with P
b
< 5 mbar (500 Pa).
Table 4 - DX pumps technical data
Parameter EXT255DX ISO100 EXT255iDX ISO100
EXT255DX
100CF
Mass 6.25 kg 6.25 kg 8.5 kg
Inlet flange DN100ISO-K DN100ISO-K DN100CF
Outlet flange DN25NW DN25NW DN25NW
Vent port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Purge port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Interstage port (optional) - DN25NW -
Inlet pumping speed
N
2
220 l s
-1 *
220 l s
-1 *
220 l s
-1 *
He 230 l s
-1 *
230 l s
-1 *
230 l s
-1 *
H
2
180 l s
-1 *
180 l s
-1 *
180 l s
-1 *
Inlet compression ratio
N
2
>1 x 10
8
>1 x 10
8
>1 x 10
8
He 4 x 10
5
3 x 10
5
4 x 10
5
H
2
1 x 10
4
1 x 10
4
1 x 10
4
Interstage pumping speed, for
interstage DX pumps with N
2
70 sccm flow through interstage port - - -
5 sccm flow through interstage port - - -
Interstage pumping speed, for
N
2
-10 l s
-1
-
He - 8 l s
-1
-
Ultimate pressure:
with rotary vane backing pump:
†
<5 x 10
-9
mbar
(DN100ISO-K inlet
flange)
<5 x 10
-9
mbar
(DN100ISO-K inlet
flange)
<5 x 10
-10
mbar
(DN100CF inlet flange)
Table 3 - DX pumps technical data (continued)
Parameter
EXT75DX
ISO63
EXT75DX
63CF
EXT75DX
NW40
EXT75DX
ISO100