Edwards EXT75DX - Page 28

B722-40-880 Issue F
Page 20 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
Figure 5 - Typical pumping system with a DX pump
1. Vacuum system
2. High-vacuum gauge
3. Vibration isolator
4. Inlet screen
5. DX pump
6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10.Rotary backing pump
11.Mist filter
12.Vent valve
13.Alternative position for vent valve
14.Air cooler
15.PRX purge restrictor
16.Regulated purge gas supply
17.WCX water cooler and connections