Edwards iXL500Q User Manual

iXL Dry Pumping Systems
ASXXXXXXXX00
Where r = reserved for future use
Booster Size
Low Voltage
0 = None
1 = r
2 = r
3 = r
4 = 1800
5 = 3000
High Voltage
A = None
B = r
C = r
D = r
E = 1800
F = 3000
TMS System
0 = Standard
1 = r
Exhaust
0 = r
1 = Standard
without
check valve.
2 = r
3 = r
Seals
0 = r
1 = r
2 = Standard
3 = EES
Pump
Motor
0 = None
1 = 4.5 kW
2 = 7.5 kW
3 = 11 kW
Booster
Motor
0 = None
1 = r
2= 4.5 kW
3 = 7.5 kW
4 = r
Gas Module
0 = None
1 = Loadlock (4 slm flow)
2 = r
3 = r
4 = r
Dry Pump
0 = None
1 = r
2 = r
3 = 250
4 = r
5 = 500
6 = 750

Edwards iXL500Q Specifications

General

Brand	Edwards
Model	iXL500Q
Category	Water Pump
Language	English