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Edwards iXL600 User Manual

Edwards iXL600
70 pages
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A540-55-880
Issue D
Instruction Manual
iXL600 and iXL1000 Dry Pump Systems
Description Item Number
iXL600 200-460 V 50/60 Hz A541-33-010
iXL600N 200-460 V 50/60 Hz A541-34-010
iXL1000 200-460 V 50/60 Hz A541-53-020
iXL1000N 200-460 V 50/60 Hz A541-54-020
Original Instructions

Table of Contents

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Edwards iXL600 Specifications

General IconGeneral
BrandEdwards
ModeliXL600
CategoryWater Pump
LanguageEnglish

Summary

Introduction

Scope and Definitions

Defines manual's scope and key terms for pump system operation.

Applications

Outlines intended uses and application areas for the iXL600/iXL1000 pump systems.

The iXL600 and iXL1000 Systems

Describes the iXL600 and iXL1000 pump system features and variants.

Priority of Control

Explains control hierarchy between front panel, PDT, and tool interfaces.

Green Mode

Details the energy-saving Green Mode functionality and activation.

Technical Data

General Technical Data

Provides physical, environmental, and material specifications for the pumping system.

Performance Data

Details pumping speed, ultimate vacuum, and maximum continuous inlet pressure.

Loading Data

Specifies dimensions, center of gravity, and load distribution for installation.

Nitrogen Purge Data

Outlines requirements for nitrogen supply and flow for N variant pumps.

Electrical Data

Covers motor ratings, power, current, voltage, and protection requirements.

Cooling Water Data

Specifies water quality, flow rates, pressure, and temperature parameters.

Tracer Gas Analysis

Presents results from fugitive emission testing for various process gases.

Installation

Locate the Dry Pumping System

Guides on positioning the system and ensuring a level installation.

Lubrication

Notes factory pre-charge of oil and no user adjustment needed.

Connect the Dry Pumping System to the Vacuum/Exhaust System

Instructions for connecting inlet/exhaust pipelines, including safety warnings.

Connect to the Factory Extraction System (Optional)

Describes connecting the optional secondary exhaust ventilation.

Connect the Nitrogen Supply

Details connecting the nitrogen supply for N variant pumps.

Leak Test the System

Procedures for leak testing after installation to prevent ingress/egress.

Electrical Supply

Covers electrical connection requirements, safety, and wiring.

Connect an Additional RF Earth (Ground) (Optional)

Guidance for connecting RF earth in high RF emission areas.

Connect to the Emergency Stop Circuit

Explains how to connect the system to an emergency stop circuit.

Connect and Set Up the Cooling Water

Step-by-step guide for connecting and verifying cooling water flow.

Accessories

Refers to Section 7.3 for available accessories and their installation.

Commission the System

Steps for final checks and start-up after installation.

Install Additional Safety Equipment

Guidance on installing extra safety measures for nitrogen supply.

Maintenance

Safety and Maintenance Frequency

Outlines safety precautions and general maintenance practices.

Relocate the System for Maintenance

Provides procedures for safely moving the system for service.

Draining the Cooling Water

Instructions for draining cooling water before transport or storage.

General Maintenance

Recommends visual inspection and basic checks.

Inspect the Connections, Pipelines, Cables and Fittings

Details checks for secure and undamaged connections within the enclosure.

Gas Module Configuration

Notes on checking and adjusting nitrogen flow on N variant pumps.

Transportation, Storage and Disposal

Transportation

Safety warnings and procedures for transporting the system.

Storage

Guidelines for storing the system under clean, dry conditions.

Disposal

Safety and environmental requirements for disposing of the system.

Service, Spares and Accessories

Introduction

Information on ordering parts and returning equipment for service.

Service

Details available service options from Edwards Service Centres.

Accessories

Lists and describes accessories available for the pump systems.

Appendix A1: Pump Display Terminal

LEDs

Explains the meaning of status LEDs on the Pump Display Terminal (PDT).

Pump Start / Stop and Control

Instructions for operating the pump via the PDT interface.

Warning / Alarm Display and Acknowledgement

How warnings and alarms are displayed and acknowledged on the PDT.

Menus

Overview of the PDT's menu structure and navigation options.

Appendix A2: Troubleshooting

Warnings

Information on system warnings, indicators, and specific warning messages.

Alarms

Details system alarms, their causes, and recommended actions.

Inverter Warnings and Alarms

Explains inverter codes for diagnosing faults and errors.

Other Problems

Covers issues like pump controller communication failures.

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