Edwards iXL600

A540-55-880 Issue D
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Service, spares and accessories
7.3.10 Nitrogen flow switch assembly
Provides a signal when flow is within limits and may be used as an interlock.
7.3.11 Interface modules
7.3.11.1 MicroTIM
Tool specific control & monitoring via parallel interface (except for LAM-LON & RS232 Micro-TIM's which are serial
interface devices).
7.3.11.2 EMS modules
Tool specific emergency stop interfaces.
Table 24 - Nitrogen switch assembly
Item Item number
Nitrogen flow switch assembly A50797000
Table 25 - MicroTIM modules
MicroTIMs Item number
SPI D37360310
MCM D37360320
TEL D37360330
Semi E73 D37360340
LAM Alliance D37360350
C3 D37360360
Hitachi D37360370
Config Storage D37360390
eTIM D37361500
LAM-LON D37362000
RS232 D37370385
Tab l e 2 6 - E MS m od ule s
EMS Modules Item number
SPI D37370310
MCM D37370320
TEL D37370330
Semi E73 D37370340
LAM Alliance D37370350
C3 D37370360
Hitachi D37370370