A540-55-880 Issue D
Page 2 © Edwards Limited 2015. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
The following warnings only appear in this manual:
Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards, or on
www.edwardsvacuum.com.
1.2 Applications
The dry pump systems are intended for use on load lock and light duty applications as shown in Figure 1. Users must
complete a risk assessment and implement any necessary controls for pumping potentially flammable gases. Edwards
can offer advice and assistance in matching the pump to the application. If using the iXL600(N) or iXL1000(N) system
on an application for which it is not intended, the warranty may be invalidated.
Figure 1 - Applications
1.3 The iXL600 and iXL1000 Systems
The iXL600 and iXL1000 are combination dry pump and booster systems. The systems are for use on light duty
applications and the N variants are fitted with a gas module that supplies nitrogen purge gas to the pump mechanism
areas. The stators, motors and the inverter drives are water cooled. The pumping systems can be controlled by the
front control panel, a PDT accessory or by the tool via a MicroTim.
Warning - Risk of explosion. Warning - pressurised.
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