Edwards iXL600

A540-55-880 Issue D
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Technical data
2.7 Tracer gas analysis
Tracer gas fugitive emission testing was carried out in accordance with the method given in Appendix A2 of SEMI S6.
A 50 mm duct was connected to the extraction port on top of the enclosure.
Table 10 - Tracer gas test parameters
Tes t Pa ram ete rs
Tracer gas SF
6
(Sulphur Hexafluoride)
Tracer gas concentration 100%
Tracer gas release rate 0.25 to 1 slm
Tracer gas release points Tracer gas flow evenly split between 2 release points
1) exhaust flange on pump
2) exhaust elbow joint within exhaust extraction cover
Table 11 - Tracer gas test system parameters
System Parameters
iXL600/
iXL1000
iXL600N/
iXL1000N
Units
Extraction flow rate:
From port on top of enclosure 180 180 m
3
/h
Volume of enclosure 0.11 0.11 m
3
Free volume of enclosure 0.069 0.068 m
3
Air changes per minute 43.5 44.3 per min
Table 12 - Worst case test results
Process Gas
Maximum
Gas Flow
(slm)
TLV/LEL
(ppm)
25% TLV/
LEL
(ppm)
SF
6
Release
rate (slm)
Max SF
6
Detected
outside
enclosure
ERC
(ppm)
Pass/
Fail
*
*
Where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV).
Chlorine Cl
2
0.2 0.5 0.125 1 0.25 0.05 Pass
Ammonia NH
3
20 25 6.25 1 0.25 5.00 Pass
Carbon Monoxide CO 0.3 1 0.25 1 0.25 0.08 Pass
Fluorine F
2
0.5 25 6.25 1 0.25 0.13 Pass
Hydrogen H
2
30 4000 1000 1 0.25 7.50 Pass
Methane CH
4
0.05 1000 250 1 0.25 0.01 Pass
Nitrous Oxide N
2
O 20 50 12.5 1 0.25 5.00 Pass
Nitrogen Trifluoride NF
3
0.5 10 2.5 1 0.25 0.13 Pass
Hydrogen Chloride HCI 0.4 5 1.25 1 0.25 0.10 Pass
Sulphur
Hexafluoride
SF
6
0.2 1000 250 1 0.25 0.05 Pass
Silicone
Te tr ac h l or id e
SiCl4 0.1 1 0.25 1 0.25 0.03 Pass