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Edwards iXH3030T

Edwards iXH3030T
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M561-00-880
Issue C Original
Instruction Manual
iXH, iXL and pXH Dry Pumping Systems

Table of Contents

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Edwards iXH3030T Specifications

General IconGeneral
BrandEdwards
ModeliXH3030T
CategoryWater Pump
LanguageEnglish

Summary

Introduction

Applications

Details the Semiconductor, Solar, and FPD processes where iXH, iXL, pXH systems are used.

Technical Data

Performance data

Lists typical peak pumping speed, ultimate vacuum, and maximum continuous inlet pressure.

Electrical data

Presents electrical specifications like motor ratings, current ratings, fuse requirements, and cable sizes.

Installation

Locate the dry pumping system

Provides instructions and warnings for positioning and securing the pumping system.

Connect to vacuumexhaust system

Guides on connecting the pump inlet and outlet to vacuum and exhaust systems, including pipeline requirements.

Electrical supply

Covers safety requirements for connecting the system to the electrical supply, including isolation and grounding.

Mains supply cable connection

Provides detailed instructions for connecting the mains power cable, including connector types and assembly.

Commission the system

Details the steps for commissioning the system after installation, including checks and start-up procedures.

Operation

Start-up Procedure

Outlines the steps and safety checks required before starting the pumping system.

PDT operation

Describes how to start and stop the pump using the Pump Display Terminal (PDT).

Manual shut-down

Explains how to perform manual shut-down procedures, including different modes.

Automatic shut-down

Describes how the system handles automatic shut-down based on alarm conditions and the 'Run 'til crash' feature.

Unplanned shut-down and alarms

Lists pump protection sensors and the conditions that trigger warnings and alarms.

Emergency stop

Explains how to use the emergency stop switch and its behaviour, noting it's not an electrical isolator.

Maintenance

Safety and maintenance frequency

Covers general safety precautions and recommended frequency for maintenance tasks.

Appendix A1: Pump Display Terminal

Pump startstop and control

Details how to start, stop, and take control of the pump using the PDT.

WarningAlarm display and acknowledgement

Describes how warnings and alarms are displayed on the PDT and how to acknowledge them.

COMMANDS menu

Lists commands available via the PDT for controlling system functions like valves and pump modes.

Appendix A2: Troubleshooting

PDT warnings

Details warning messages displayed on the PDT, their causes, and recommended actions.

Alarms

Explains how alarm conditions are indicated by LEDs on control panels and the PDT.

PDT alarms

Details alarm messages displayed on the PDT, their causes, and recommended actions.

Inverter warnings and alarms

Explains how to decode inverter warning and alarm codes reported by the PDT.

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