Edwards iXH3030T User Manual

iXH and pXH Dry Pumping Systems
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Booster Size
Low Voltage
0 = None
1 = 600G
2 = r
3 = 1200
4 = 1800
5 = 3000
6 = 4500
7 = 6000
Dry Pump
Standard
0 = None (pXH)
1 = 100
2 = 200
3 = 300
4 = r
5 = r
6 = r
7 = r
TMS System
0 = Standard
1 = T-Variant
2 = T-Variant
+ heated
booster
3 = r
4 = r
5 = r
Gas Module
0 = None (pXH) 6 = Single Mode +
1 = Loadlock (44 slm flow)
(4 slm flow)
2 = Single Mode 7 = Single Mode +
(44 slm flow) (96 slm flow)
3 = Single Mode 8 = Single Mode +
(96 slm flow) (133 slm flow)
4 = Single Mode 9 = Single Mode +
(133 slm flow) (204 slm flow)
5 = Single Mode A = Multi Mode
(204 slm flow) (44 slm flow)
B = Multi Mode
(96 slm flow)
C = Multi Mode
(133 slm flow)
D = Multi Mode
(204 slm flow)
Exhaust
0 = r
1 = Standard
without
check valve.
2 = r
3 = Standard with
check valve.
Seals
0 = r
1 = r
2 =Standard
Pump
Motor
0 = None
1 = 4.5 kW
2 = 7.5 kW
3 = 11 kW
Booster
Motor
0 = None
1 = 1.9 kW
2 = 4.5 kW
3 = 7.5 kW
4 = r
High Voltage
A = None
B = 600G
C = r
D = 1200
E = 1800
F = 3000
G = 4500
H = 6000
Harsh
A = 100
B = 200
C = 300
D = 450
E = 500
Where r = reserved for future use
Special
Features
0 = None
1 = Application Specific
2 = Application Specific
3 = Application Specific
4 = Application Specific
5 = Application Specific
6 = Application Specific
7 = Application Specific
8 = Application Specific
9 = Application Specific

Edwards iXH3030T Specifications

General

Brand	Edwards
Model	iXH3030T
Category	Water Pump
Language	English