M561-00-880 Issue C
Page 2 © Edwards Limited 2012. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
The following warnings only appear in this manual:
Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards, or on
www.edwardsvacuum.com.
1.2 Applications
iXH, iXL and pXH pumping systems are intended for use on the Semiconductor, Solar and FPD processes shown in
Figure 1.
Figure 1 - Applications
The iXL systems are intended for use on clean duty applications.
If you use the system on an application for which it is not suitable, you may invalidate your warranties. If in doubt,
contact Edwards who will advise you as to the suitability of the system for any particular application.
1.3 Description
The iXH dry pump range has been developed to meet the demanding requirements for process pumping solutions in
the Semiconductor, Flat Panel and Solar industries. The range sets new standards for harsh process capability,
reliability and reduced cost of ownership in low footprint packages.
The iXL pump range has been developed to meet cyclic loadlock duty applications used in the flat panel and solar
industries.
The pXH booster systems are not intended for use as stand-alone units. Each system must be backed using a suitable
Edwards dry pump selected to match process and performance specifications.
1.4 Priority of control
The pumping system can be controlled by a number of modules: the front control panel (refer to Figure 2), a Pump
Display Terminal (PDT), the Edwards System Controller or by the tool through the MicroTIM or one of the serial
interfaces. Only one of these can have control of the system at any one time. That is, once one of these has control
of the system, control requests from the others are denied.
In addition to the control modules listed above, the pXH proximity booster can control or be controlled by the
Edwards backing pump. Contact Edwards for more information on how to control a pXH using an iXH or other Edwards
pumping system.
The PDT indicates who is in control. LEDs are also provided on the rear panel, front panel or PDT, which illuminate
to indicate 'in control'.
Warning - Risk of explosion. Warning - pressurised.
iXH, iXL and pXH applications
ALD Metal Etch RTP
HDP-CVD Metrology SACVD
Implant Source Oxide etch Silicon Etch
Lithography PECVD Strip/Ashing
Load lock PVD Pre-Clean Transfer
LPCVD PVD Process
MOCVD RTA
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