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Edwards iXM1200 Standard User Manual

Edwards iXM1200 Standard
104 pages
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Dry Pump System
iXM
INSTRUC
TION MANUAL
M56635880_D Original ins
trucons
edw
ardsvacuum.com

Table of Contents

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Edwards iXM1200 Standard Specifications

General IconGeneral
BrandEdwards
ModeliXM1200 Standard
CategoryWater Pump
LanguageEnglish

Summary

Safety and Compliance

Definition of Warnings and Cautions

Explains the meaning of NOTICE, WARNING, and CAUTION statements used in the manual.

Safety Symbols

Lists and describes safety symbols used in the manual and on the product for hazard awareness.

General Description

Overview of iXM Dry Pump Systems

Introduces the iXM series, its capabilities, and available capacity classes for various applications.

Applications of iXM Pumping System

Details the intended applications for the iXM pumping system and related warranty implications.

Advanced Control and Monitoring

Describes EdCentra for monitoring and data acquisition, and system configuration options.

Green Mode Functionality

Explains the Green Mode function for reducing utility consumption during system standby.

Technical Data

General Technical Specifications

Provides key specifications like dimensions, mass, noise, and performance data for iXM models.

Operating and Storage Conditions

Details ambient temperature, humidity, altitude, and enclosure protection requirements for operation.

Manufacturing Materials

Lists materials in contact with pumped gases and their specific applications within the system.

Loading Data

Provides center of gravity and levelling foot load information for various iXM pump models.

Nitrogen Purge Data

Specifies nitrogen supply pressure, quality, and inlet connection requirements for purging.

Electrical Data

Outlines system input power, motor ratings, and general electrical specifications for iXM pumps.

Cooling Water Data

Details maximum supply pressure, flow rate, and water type for system cooling.

Tracer Gas Analysis

Presents test parameters and results for fugitive emission testing using tracer gas analysis.

Installation

Installation Safety Precautions

Highlights critical safety warnings for installation, including hazards and necessary precautions.

Unpacking and Inspection Procedure

Provides steps for safely unpacking the pump system and inspecting for any damage.

System Positioning Guidelines

Instructs on how to position the system on a firm, level surface, considering lifting requirements.

System Installation Requirements

Details securing the system, seismic brackets, and vibration isolation for safe installation.

Connecting the Pump System

Covers connecting the pump to vacuum, exhaust, nitrogen, and electrical systems.

Connect to Vacuum and Exhaust System

Instructions for connecting the pump inlet and exhaust, including crucial safety warnings.

Connect to Nitrogen Supply

Details connecting the nitrogen supply for purging and safety, including important warnings.

Connect to Electrical Supply

Covers connecting the mains supply, protective earth, and essential electrical safety measures.

Connect to Emergency Stop Circuit

Explains the procedure for connecting the system to an external emergency stop circuit.

Connect Cooling Water Supply

Provides step-by-step procedures for connecting and setting up the cooling water supply.

Connect Accessories

General guidance on installing various accessories to the dry pumping system.

Install Additional Safety Equipment

Instructions for installing extra safety equipment, such as nitrogen flow measurement.

Commissioning

System Commissioning Procedure

Outlines initial start-up, system checks, and configuration steps for the dry pump system.

Leak Testing the System

Details the importance and procedure for leak testing the installed pump system.

Configuring System with PDT

Explains how to use the Pump Display Terminal (PDT) for system configuration and monitoring.

PDT Menus and Navigation

Describes the Normal, Status, Setup, Commands, and other PDT menus for system interaction.

IP Configuration Menu

Covers setting up network parameters like IP address, DNS server, and gateway settings.

Operation

System Start-up Procedures

Details various methods for starting the pump system: MicroTIM, PDT, and front panel.

System Shut Down Procedures

Explains different methods for safely shutting down the pump system, including modes.

Gas Module Configuration

Describes how to adjust the gas ballast flow setting for the Varimode gas module.

System Operating Temperature Configuration

Guides on adjusting system operating temperatures via the PDT for process demands.

Maintenance

General Maintenance and Safety

Covers safety warnings and recommended monthly visual inspections for system upkeep.

Inspect Connections, Pipelines, Cables, and Fittings

Provides instructions for inspecting internal connections, pipelines, and cables for damage.

Fault Finding

System Warnings

Explains warnings indicated via LEDs and PDT messages, with causes and actions.

System Alarms

Details alarm indications, messages, causes, and recommended actions for system issues.

Unplanned Shut Down and Alarms

Lists sensors and conditions triggering warnings/alarms, including temperature limits.

PDT Events

Lists specific events detected by the PDT and required actions, like equipment connection checks.

Inverter Warnings and Alarms

Describes inverter-related warnings and alarms, their causes, and recommended actions.

Decommissioning

Decommissioning Safety

Outlines essential safety precautions and PPE required for decommissioning the system.

Relocating the System for Decommissioning

Provides procedures for safely moving the system for maintenance or decommissioning.

Draining Cooling Water for Decommissioning

Details the process for draining the system's cooling water before transport or storage.

System Transportation

Offers guidance on safely transporting the system, including warnings for oil leakage.

Storage

System Storage Instructions

Provides instructions for storing the system in clean, dry conditions until required for use.

Disposal

Hazardous Material Disposal

Covers safe disposal of the system and components, adhering to environmental requirements.

Service

Returning Equipment for Service

Explains the procedure for returning equipment for service, including required forms.

Accessories

Disconnect Box

Details the disconnect box for SEMI S2 compliance and EMO functionality.

Accessory Modules

Describes Active and Passive Accessory Modules for system connectivity and expansion.

Pump Display Terminal (PDT)

Information on the PDT for pump control, monitoring, and status reporting.

PDT Holster and Extension Cable

Information on the PDT holster for attachment and extension cables for remote use.

Seismic Restraint Brackets

Details seismic restraint brackets for installations requiring earthquake protection.

Interface Modules

Covers MicroTIM, EMS, and iGateway modules for system control and communication.

Exhaust Accessories

Lists exhaust check valves and extraction cover kits for safe gas management.

Constant Flow Water Valves

Describes valves that provide a set cooling water flow to the pumping system.

Water Flow Monitor Assembly

Details the assembly that measures and displays water flow rate on the PDT.

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