6
7. Discharge the gas by the gas reclaim system.
8. Weld the tube and capillary lined with the COND and take the COND up.
9. Reinstall the parts followed the above steps.
4.3 Caplliary
1. Refer to 1.1 to remove the front panel and rear panel
2. Refer to 1.2 to remove the c-box.
3. Refer to 1.3 to remove upper wind blow.
4. Weld the capillary and take it out.