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Keithley
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6220 DC
Keithley 6220 DC User Manual
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All other trademarks and trade names are the property of their respective companies.
A GREA
TER MEASUR
E OF CONFI
DENCE
Keithley Instruments, Inc.
Corporate Headquarters
• 28775
Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY
• www
.keithley
.com
12/06
7.5X9BackCovr 12-06.qxd 1/10/07 2:45 PM Page 1
170
Table of Contents
Default Chapter
7
Safety Precautions
7
Table of Contents
9
1 Getting Started
17
Introduction
18
User's Manual Content and Structure
18
Capabilities and Features
18
General Information
19
Warranty Information
19
Contact Information
19
Safety Symbols and Terms
19
Unpacking and Inspection
19
Options and Accessories
20
Front and Rear Panel Familiarization
20
Front Panel Summaries
20
Figure 1-1 Models 6220 and 6621 Front Panels
21
Rear Panel Summaries
24
Getting Started
24
Figure 1-2 Model 622X Rear Panel
24
Heat Sink and Cooling Vents
25
Power-Up
27
Line Power Connection
27
Source Preset
28
Disabling the Front Panel
28
Menus
29
CONFIG Menus
29
Direct Access Menus
29
Editing Controls
30
Source and Compliance Editing
30
Menu Navigation
30
Figure 1-3 Menu Editing Keys
30
Password
32
Remote Interface
33
Error and Status Messages
33
Default Settings
34
Save and Restore Setups
34
Select Power-On Setup
35
SCPI Programming
35
Optional Command Words
35
Query Commands
35
2 Output Connections
37
Figure 2-2 lo and GUARD Banana Jacks
37
Figure 2-3 INTERLOCK
37
Output Connectors
38
Triax Connector
38
Ground Points
39
LO and GUARD Banana Jacks
39
Interlock
40
Output Configurations
41
Triax Inner Shield
42
Triax Output Low
43
Guards
44
Triax Cable Guard
44
Connections to DUT
45
Supplied Triax Cable
45
Basic Connections
46
Shields and Guarding
46
Figure 2-7 Noise Shield
47
Figure 2-8 Safety Shield
47
Figure 2-9 Cable Guard Connections – Triax Inner Shield Connected to Cable Guard
48
Floating the Current Source
45
Using a Test Fixture
49
600 DC Current Source Operation
51
Current Source Output Capabilities
51
Source Ranges
51
Compliance
52
Output Power (Source or Sink)
52
Output Response
54
Setting Source and Compliance
57
Source and Compliance Editing
57
Autorange
60
Source Preset
61
Sourcing Current
61
Remote Programming - Source Output Commands
64
Table 3-2 DC Output Commands
64
Applications
65
4 Sweeps
67
Sweep Overview
67
Linear Staircase Sweep
67
Logarithmic Staircase Sweep
68
Custom Sweep
68
Figure 4-1 Comparison of Sweep Types
68
Sweep Characteristics
69
Custom Sweep Editing
69
Using Auto-Copy with Custom Sweeps
69
Source Ranging
69
Sweep Delay
70
Front Panel Sweep Operation
70
Using the Sweep Configuration Menu
70
Performing a Staircase Sweep
71
Performing a Custom Sweep
72
Remote Sweep Operation
73
Running a Staircase Sweep
74
Running a Custom Sweep
75
SCPI Commands - Sweeps
76
Table 4-4 Custom (List) Sweep Commands
77
5 Delta, Pulse Delta, and Differential Conductance
78
Operation Overview
79
Figure 5-1 Delta, Pulse Delta, and Differential Conductance Measurements
80
Test Systems
81
Keithley Instrumentation Requirements
81
System Configurations
81
System Connections
82
Figure 5-3 System Connections – Stand-Alone Operation
83
Figure 5-4 System Connections – PC Control of Model 622X
84
DUT Test Connections
85
Configuring Communications
86
Triggering Sequence
87
Readings
88
Display Readings
88
Measurement Units
88
Table 5-1 Measurement Unit Commands
89
Read Commands
90
Delta
90
Model 622X Measurement Process
90
Figure 5-6 Delta Measurement Technique
91
Configuration Settings
92
Operation
93
Setup and Arm Commands
96
Table 5-2 Delta Commands
97
Pulse Delta
98
Model 6221 Measurement Process
98
Pulse Delta Outputs
99
Figure 5-8 Pulse Timing
101
Figure 5-9 Pulse Sweep Output Examples
102
Configuration Settings
103
Operation
106
Setup Commands
109
Table 5-3 Pulse Delta Commands
110
Differential Conductance
111
Model 622X Measurement Process
111
Figure 5-10 Differential Conductance Measurement Process
113
Configuration Settings
115
Operation
116
Setup and Arm Commands
119
Table 5-4 Differential Conductance Commands
120
6 Averaging Filter, Math, and Buffer
122
Averaging Filter
123
Averaging Filter Characteristics
123
Filter Setup and Control
125
Remote Programming - Averaging Filter
125
Math
126
MX+B and M/X+B (Reciprocal)
126
Configuring MX+B and M/X+B
127
Remote Programming - Math
127
Table 6-3 Math Commands
127
Buffer
128
Buffer Characteristics
128
Storing Readings
129
Recall
129
Figure 6-1 Buffer Recall
130
Table 6-4 Buffer Commands
130
7 Wave Functions (6221 Only)
132
Wave Function Overview
133
Setting Waveform Parameters
134
Ranging
134
Frequency
135
Offset
135
Duty Cycle
136
Phase Marker
137
Duration
138
Externally Triggered Waveforms
138
Front Panel Wave Function Operation
139
Using the Wave Function Menu
139
Generating a Sine Wave
141
Generating an Arbitrary Waveform
142
Remote Wave Function Operation
143
Programming Sine Waves
144
Programming Arbitrary Waveforms
145
SCPI Commands - Wave Functions
146
Table 7-4 Waveform Function Commands
146
Specifications
148
Table B-1 Calculate Command Summary
155
Table B-2 Display Command Summary
155
Table B-3 Format Command Summary
155
Table B-4 Output Command Summary
155
Table B-5 Sense Command Summary
155
Table B-6 Source Command Summary
155
Table B-7 Status Command Summary
155
Table B-8 System Command Summary
155
Table B-9 Trace Command Summary
155
Table B-10 Trigger Command Summary
155
SCPI Tables (Abridged)
157
Table B-11 Units Command Summary
164
4
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Keithley 6220 DC Specifications
General
Brand
Keithley
Model
6220 DC
Category
AC Power Distribution
Language
English
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