S530
Diagnostic Manual
© 2011, Keithley Instruments, Inc.
All rights reserved.
Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part, without the prior written approval
of Keithley Instruments, Inc. is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand
names are trademarks or registered trademarks of their respective holders.
The Lua programming language is copyright © 1994-2011, Tecgraf, PUC-Rio. Terms of license for the Lua Programming
Language can be accessed at http://www.lua.org/license.html.
Cleveland, Ohio, U.S.A.
Document Number: S530-906-01 Rev. A / March 2011
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