Keithley S530

Table of Contents S530 Diagnostic Manual
ii S530-906-01 Rev. A / March 2011
Kelvin SMU diagnostic test flow........................................................................................... 3-2
SMU communication Test ......................................................................................................... 3-2
Kelvin SMU voltage and current test.................................................................................... 3-3
Kelvin voltage communication test....................................................................................... 3-6
Kelvin matrix diagnostic ....................................................................................................... 3-6
Matrix Communication Test.......................................................................................................3-6
Kelvin basic short and continuity tests ................................................................................. 3-6
Kelvin short test.................................................................................................................. 3-10
Short test flow ......................................................................................................................... 3-10
Kelvin continuity test ..........................................................................................................3-12
Continuity pin test.................................................................................................................... 3-12
Kelvin leakage test .............................................................................................................3-16
S530 troubleshooting information ............................................................. Appendix C
Introduction .......................................................................................................................... 4-1
CVU confidence check testing .................................................................................................. 4-1