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Table of Contents S530 Diagnostic Manual

ii S530-906-01 Rev. A / March 2011

Kelvin SMU diagnostic test flow........................................................................................... 3-2

SMU communication Test ......................................................................................................... 3-2

Kelvin SMU voltage and current test.................................................................................... 3-3

Kelvin voltage communication test....................................................................................... 3-6

Kelvin matrix diagnostic ....................................................................................................... 3-6

Matrix Communication Test.......................................................................................................3-6

Kelvin basic short and continuity tests ................................................................................. 3-6

Kelvin short test.................................................................................................................. 3-10

Short test flow ......................................................................................................................... 3-10

Kelvin continuity test ..........................................................................................................3-12

Continuity pin test.................................................................................................................... 3-12

Kelvin leakage test .............................................................................................................3-16

S530 troubleshooting information ............................................................. Appendix C

Introduction .......................................................................................................................... 4-1

CVU confidence check testing .................................................................................................. 4-1

Keithley S530 Diagnostic Manual

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