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Keithley S530 Diagnostic Manual
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12/06
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
A GREA
TER M
EASURE OF CON
FIDENCE
Keithley Instruments, Inc.
Corporate Headquarters
• 28775
Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY
• www
.keithley
.com
66
Table of Contents
S530 Integrated Test System
1
Safety Precautions
3
Table of Contents
5
1 Introduction to S530 Diagnostics
7
Diagnostic manual content
7
Diagnostics overview
7
Operating modes
8
Engineer
8
Operator
9
Diagnostic project
10
Hardware configuration
11
Running the diagnostic tests
11
Load the default diagnostic project
11
Components not connected
13
Run diagnostics
13
Progress status
13
Report files
15
Review diagnostic reports
15
Loop the testing
15
S530 diagnostic execution flow
16
SMU diagnostic testing
17
Matrix diagnostic testing
18
CVU diagnostic testing
19
Detailed diagnostic results
20
Store diagnostic data
21
Upload To FTP PTM
21
FTP sever configuration
22
Test FTP connection
22
Appendix A: Non-Kelvin (2W) S530 system diagnostics
25
Introduction
25
Non-Kelvin hardware connection
25
Non-Kelvin SMU diagnostic test flow
25
SMU communication test
26
Non-Kelvin SMU voltage and current test
27
SMU test flow
28
SMU connections
28
Non-Kelvin Voltage communication test
29
Non-Kelvin basic short test and continuity test
29
Basic short test
29
Basic short test connections
30
Basic continuity test
30
Basic continuity test connections
31
Non-Kelvin short test
31
Short test flow
32
Short test connections
32
Non-Kelvin continuity test
33
Continuity pin test
33
Continuity test flow
33
Continuity test connections
34
SMU matrix test
34
SMU matrix test flow
34
SMU matrix test connections
34
Non-Kelvin leakage test
35
Leakage pin test
35
Leakage pin test flow
35
Leakage test connections
36
Leakage SMU Test
36
Leakage SMU test Flow
36
Leakage connection during test
37
Appendix B: Kelvin (4W) S530 system diagnostics
39
Introduction
39
Kelvin hardware connection
39
Minimum hardware requirement
39
Kelvin SMU diagnostic test flow
40
SMU communication Test
40
Kelvin SMU voltage and current test
41
SMU test flow
42
SMU connections
42
Force test
42
Sense test
43
Kelvin voltage communication test
44
Kelvin matrix diagnostic
44
Matrix Communication Test
44
Kelvin basic short and continuity tests
44
Basic short test
44
Basic continuity test
46
Basic continuity force test
46
Sense test
46
Kelvin short test
48
Short test flow
48
Force test
49
Sense test
49
Kelvin continuity test
50
Continuity pin test
50
Pin test
50
Force test
51
Sense test
51
SMU test
52
Force test
53
Sense test
53
Kelvin leakage test
54
Leakage pin test
55
Force test
55
Sense test
55
SMU Kelvin leakage test
57
Force test
57
Sense test
57
Appendix C: S530 troubleshooting information
59
Introduction
59
CVU confidence check testing
59
Table 1: 4-wire Kelvin system cards used for Open Check testing
62
Table 2: Open Check testing
64
Table 3: Short Check testing
64
Other manuals for Keithley S530
Manual
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Administrative Guide
70 pages
User Manual
93 pages
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Keithley S530 Specifications
General
Brand
Keithley
Model
S530
Category
Test Equipment
Language
English
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