Installation and Service Guide N5251-90001 2-5
PNA Series Microwave Network Analyzer System 
N5251A
    System Description
Basic System Measurement Configurations
Figure  2-2 Coaxial Measurement Configuration, 2-Port System
Wafer Probe Measurement
In this configuration, the test head modules are placed on X-Y-Z positioners that are mounted 
to the wafer probe station. Each 1.0 mm test port is directly connected to a wafer probe. 
assembly via a coaxial cable.
The wafer probe measurement configuration is not documented in this manual.
For information about probing equipment and accessories, contact:
For additional information on DUT bias connections, refer to Table 4-4 on page 4-4, 
Figure 4-1 on page 4-5, and Figure 4-2 on page 4-6.
Cascade Microtech, Inc.
9100 SW Gemini Drive 
Beaverton, Oregon 97008,USA 
Toll-free telephone: (800) 550-3279
Telephone: (503) 601-1000
Fax: (503) 601-1002
Web site: 
www.cascademicrotech.com