Flange mounting for ISO-K flanges
When flanging on the high vacuum connecting flange, place the O-ring on
the centering ring. The O-ring must remain in place smooth and untwisted.
Thereafter put the outer ring in place.
Mount the turbomolecular pump according to Fig 3.2 or 3.3 and tighten the
bolts crosswise step-by-step.
When using an ultra sealing ring, always use an outer support ring. The infor-
mation on the number of bolts and clamps also applies to the ultra sealing
rings.
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
When using collar flanges or claws for mounting the
TURBOVAC 361 with flange DN 100 ISO-K and
TURBOVAC 600/1000/1100 with flange DN 160 ISO-K,
the pump may twist should the rotor suddenly seize.
Flange mounting for CF flanges
Before fitting, check to ensure that the sealing edge is undamaged. Do not
touch the copper gasket and the sealing edge with your bare hands.
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
Mount the turbomolecular pump according to Fig 3.4 and tighten the bolts
crosswise step-by-step.
When the pump shall be baked out, the threads of the bolts should have
been lubricated with a high temperature lubricant.
Owing to the deformation of the copper gasket, the fastening torque of all
bolts must be checked once more after having completed the installation
work.
During operation the pump can get so hot that there is the risk of suffer ing
burns (up to approximately 80 °C). Protect the hot parts against being
touched.
NOTICE
WARNING
NOTICE
CAUTION