To Next Page
J
Jill HuberSep 12, 2025
What does LOCKED mean on my MKS Control Unit?
- Rrick93Sep 13, 2025
The 'LOCKED' message on your MKS Control Unit indicates that an interface function is locked. Send the TLU or UNL command to unlock the interface function.
What does LOCKED mean on my MKS Control Unit?
The 'LOCKED' message on your MKS Control Unit indicates that an interface function is locked. Send the TLU or UNL command to unlock the interface function.
General| Brand | MKS |
|---|---|
| Model | 390 Series |
| Category | Control Unit |
| Language | English |
Explains manual content, responsibilities, and contact information.
Details safety statements to prevent damage, injury, or inaccurate measurements.
Explains the importance and procedure for proper grounding of vacuum equipment.
Describes dangers of injury and equipment damage from vacuum system over-pressurization.
Provides guidelines for safe operation, including handling of glass pins and pressure relief.
Emphasizes compliance with all instructions and the use of recommended parts.
Lists and defines terms used throughout the manual for the Micro-Ion ATM module.
Provides contact information for customer service and technical support.
Lists the main components of the Micro-Ion ATM Module: gauge, sensors, and connections.
Recommends installing pressure relief devices to prevent over-pressurization errors.
Details the steps for installing the module, including locating and attaching it.
Provides guidelines for selecting an optimal location for module accuracy and stability.
Details how to attach the module to the vacuum chamber using VCR, KF, or ConFlat fittings.
Explains connecting the power supply, gauge/degas, and wiring terminals based on module output type.
Describes how to properly ground the module housing to the vacuum chamber.
Explains how to calibrate the module at atmospheric pressure using a switch or RS-485 command.
Discusses RFI compliance and potential interference issues with the module.
Lists tasks that can be performed with analog outputs, referencing specific pages for instructions.
Lists tasks and commands for RS-485 interface operation, including process control.
Explains automatic filament selection based on filament material and pressure conditions.
Describes how analog outputs indicate vacuum or differential pressure based on module configuration.
Outlines procedures before putting the module into operation, including installation and schematics.
Lists tasks that can be performed once the module is operating, referencing the Table 3-1.
Explains the LED status indicator and its indications for module and gauge status.
Details how to read vacuum and differential pressure using analog outputs and calculation equations.
Explains how to read differential pressure using analog output voltage and provides calculation formulas.
Explains how to turn the Micro-Ion gauge OFF and its implications for output values.
Describes how to initiate and terminate the degas cycle for the Micro-Ion gauge.
Details how to calibrate the module at atmospheric or vacuum pressure using a momentary switch.
Explains the process and requirements for calibrating the module at atmospheric pressure.
Explains the process and requirements for calibrating the module at vacuum pressure.
Describes how RS-485 modules handle pressure outputs and relay assignments.
Outlines procedures before putting the module into operation with RS-485 communications.
Lists specifications for the RS-485 physical layer, including arrangement, baud rate, and address.
Lists operational tasks that can be performed using RS-485 commands.
Details RS-485 error responses and their possible causes and solutions.
Explains the data timing and response sequence, including delay limits for RS-485 communication.
Introduces RS-485 commands, including command structure and symbols.
Explains symbols used in RS-485 commands, like the carriage return character.
Lists RS-485 commands affecting module operation and those not affecting operation.
Explains how to lock or unlock interface functions using the TLU command.
Describes how to unlock interface functions previously locked by the TLU command.
Details how to assign a unique address to the module for RS-485 communication.
Explains how to set the baud rate for RS-485 communication.
Describes how to restore RS-485 communication to default settings.
Explains how to set the pressure unit (Torr, mbar, or Pa) for the module.
Determines whether the optional display shows vacuum, differential, or both pressure types.
Reads the currently set pressure unit (Torr, mbar, or Pascal).
Reads the vacuum pressure value from the module, returned in the set pressure unit.
Reads the differential pressure value, indicating positive or negative pressure.
Sets activation and deactivation trip points for process control relays.
Assigns relays to vacuum or differential pressure measurements.
Disables or enables specified relays, or reads their current state.
Returns a numeric value indicating the activated or deactivated status of relays.
Commands to turn the Micro-Ion gauge ON or OFF.
Reads the current ON/OFF status of the Micro-Ion gauge.
Enables or disables pressure indications from the Conductron sensor when the gauge is OFF.
Reduces filament burnout risk by delaying gauge ON time based on pressure.
Adds to, determines, or reads the delay time before the gauge turns ON.
Sets the gauge to manual, alternating, or automatic filament operation mode.
Returns a character string indicating which filament is operating.
Initiates or terminates the Micro-Ion gauge degas cycle.
Reads the current state of the Micro-Ion gauge degas cycle.
Sets or reads the duration of the Micro-Ion gauge degas cycle.
Sets the pressure points for switching between low and high emission currents.
Reads the current emission mode (high or low) of the Micro-Ion gauge.
Sends the command to calibrate the module at atmospheric pressure.
Sends the command to calibrate the module at vacuum pressure.
Sets or reads the pressure value indicated at zero differential.
Reads RS-485 character strings indicating the module's operating status.
Reads a 32-bit hexadecimal value indicating specific error conditions or status.
Resets the module to its power-up status, similar to cycling power.
Restores module parameters to their default factory settings.
Reads the internal part number and firmware version of the module.
Describes the backlit matrix display's ability to show pressure and error conditions.
Explains how display resolution changes with the module's operating pressure range.
Describes how error conditions are indicated on the display and how to troubleshoot them.
Provides contact information for service, troubleshooting, and returns (RMA).
Lists precautions for troubleshooting electronic components, including grounding and tool usage.
Lists common symptoms, their possible causes, and recommended solutions for the module.
Details RS-485 error responses and provides solutions for specific error conditions.
Explains how to test gauge elements for open filaments or shorts using an ohmmeter.
Provides step-by-step instructions for safely removing and installing a new gauge assembly.
Details the process for returning a module for factory service, including RMA requirements.
Details specifications for absolute pressure, accuracy, and repeatability.
Lists operating, storage, and bakeout temperature ranges for the module.
Describes available output options, analog outputs, and LED status indicator functions.
Details optional display capabilities, pressure range, units, and error conditions.
Specifies relay types, contact ratings, and hysteresis for vacuum and differential pressure assignments.
Details emission current, default control settings, and filament operation modes.
Describes the Conductron sensor's sensing wires.
Details I/O connector type and power supply requirements for the module.
Lists compliance standards for EMC, Product Safety, IP rating, and environmental factors.
Provides weight, case material, materials exposed to vacuum, and dimensions.
Explains the four pressure measuring devices within the module and their interaction.
Describes how the module automatically switches sensors based on pressure levels.
Explains the functional parts of the Micro-Ion gauge and how ion current relates to gas density.
Explains how the Conductron sensor measures pressure using heat loss and resistance changes.
Explains how diaphragm sensors measure pressure and determine differential pressure.
