MKS 390 Series User Manual

Series 390
Instruction Manual
Granville-Phillips
®
Series 390 Micro-Ion
®
ATM,
Four-Sensor Combination Vacuum Gauge Module
with RS-485 Interface and Analog Output
Instruction manual part number 390001
Revision H - November 2016

MKS 390 Series Specifications

General

Brand	MKS
Model	390 Series
Category	Control Unit
Language	English

Summary

Before You Begin

About these Instructions

Explains manual content, responsibilities, and contact information.

Caution and Warning Statements

Details safety statements to prevent damage, injury, or inaccurate measurements.

System Grounding

Explains the importance and procedure for proper grounding of vacuum equipment.

Implosion and Explosion Hazards

Describes dangers of injury and equipment damage from vacuum system over-pressurization.

Operation Guidelines

Provides guidelines for safe operation, including handling of glass pins and pressure relief.

Reading and Following Instructions

Emphasizes compliance with all instructions and the use of recommended parts.

Definitions of Terms

Lists and defines terms used throughout the manual for the Micro-Ion ATM module.

Customer Service and Technical Support

Provides contact information for customer service and technical support.

Installation

Module Components

Lists the main components of the Micro-Ion ATM Module: gauge, sensors, and connections.

Pressure Relief Devices

Recommends installing pressure relief devices to prevent over-pressurization errors.

Installation Procedure

Details the steps for installing the module, including locating and attaching it.

Locating the Module

Provides guidelines for selecting an optimal location for module accuracy and stability.

Attaching Module to Vacuum Chamber

Details how to attach the module to the vacuum chamber using VCR, KF, or ConFlat fittings.

Assembling and Connecting Wiring

Explains connecting the power supply, gauge/degas, and wiring terminals based on module output type.

Chassis Grounding

Describes how to properly ground the module housing to the vacuum chamber.

Calibrating at Atmospheric Pressure

Explains how to calibrate the module at atmospheric pressure using a switch or RS-485 command.

Eliminating Radio Frequency Interference (RFI)

Discusses RFI compliance and potential interference issues with the module.

Operation Overview

Analog Operation

Lists tasks that can be performed with analog outputs, referencing specific pages for instructions.

RS-485 Operation

Lists tasks and commands for RS-485 interface operation, including process control.

Automatic Filament Selection

Explains automatic filament selection based on filament material and pressure conditions.

Analog Operation

Analog Output Functions

Describes how analog outputs indicate vacuum or differential pressure based on module configuration.

Preparing for Operation

Outlines procedures before putting the module into operation, including installation and schematics.

Operational Tasks

Lists tasks that can be performed once the module is operating, referencing the Table 3-1.

LED Status Indicator

Explains the LED status indicator and its indications for module and gauge status.

Reading Pressure via Analog Output

Details how to read vacuum and differential pressure using analog outputs and calculation equations.

Reading Differential Pressure

Explains how to read differential pressure using analog output voltage and provides calculation formulas.

Turning Micro-Ion Gauge OFF

Explains how to turn the Micro-Ion gauge OFF and its implications for output values.

Micro-Ion Gauge Degas

Describes how to initiate and terminate the degas cycle for the Micro-Ion gauge.

Calibration Procedures

Details how to calibrate the module at atmospheric or vacuum pressure using a momentary switch.

Atmospheric Pressure Calibration

Explains the process and requirements for calibrating the module at atmospheric pressure.

Vacuum Pressure Calibration

Explains the process and requirements for calibrating the module at vacuum pressure.

RS-485 Operation

Pressure Output and Relay Functions

Describes how RS-485 modules handle pressure outputs and relay assignments.

Preparing for RS-485 Operation

Outlines procedures before putting the module into operation with RS-485 communications.

RS-485 Physical Layer Specifications

Lists specifications for the RS-485 physical layer, including arrangement, baud rate, and address.

RS-485 Operational Tasks

Lists operational tasks that can be performed using RS-485 commands.

RS-485 Error Responses

Details RS-485 error responses and their possible causes and solutions.

RS-485 Data Timing and Response

Explains the data timing and response sequence, including delay limits for RS-485 communication.

RS-485 Commands Overview

Introduces RS-485 commands, including command structure and symbols.

Symbols Used in RS-485 Communication

Explains symbols used in RS-485 commands, like the carriage return character.

RS-485 Command Set

Lists RS-485 commands affecting module operation and those not affecting operation.

Toggling Locked Functions (TLU)

Explains how to lock or unlock interface functions using the TLU command.

Unlocking Interface Functions (UNL)

Describes how to unlock interface functions previously locked by the TLU command.

Setting RS-485 Address Offset (SA)

Details how to assign a unique address to the module for RS-485 communication.

Setting RS-485 Baud Rate (SB)

Explains how to set the baud rate for RS-485 communication.

Restoring RS-485 Defaults (yuiop)

Describes how to restore RS-485 communication to default settings.

Setting Pressure Units (SU)

Explains how to set the pressure unit (Torr, mbar, or Pa) for the module.

Setting Optional Display Indication (SD)

Determines whether the optional display shows vacuum, differential, or both pressure types.

Reading Pressure Units (RU)

Reads the currently set pressure unit (Torr, mbar, or Pascal).

Reading Vacuum Pressure (RD)

Reads the vacuum pressure value from the module, returned in the set pressure unit.

Reading Differential Pressure (RDD)

Reads the differential pressure value, indicating positive or negative pressure.

Process Control Relay Trip Points (PC)

Sets activation and deactivation trip points for process control relays.

Setting Trip Point Relay Assignments (PCG)

Assigns relays to vacuum or differential pressure measurements.

Setting Relay Enable/Disable State (PCE)

Disables or enables specified relays, or reads their current state.

Reading Trip Point Relay Status (RPCS)

Returns a numeric value indicating the activated or deactivated status of relays.

Turning Micro-Ion Gauge ON/OFF (IG)

Commands to turn the Micro-Ion gauge ON or OFF.

Reading Micro-Ion Gauge ON/OFF Status (IGS)

Reads the current ON/OFF status of the Micro-Ion gauge.

Setting Pressure Indication When Gauge is OFF (IGM)

Enables or disables pressure indications from the Conductron sensor when the gauge is OFF.

Setting Micro-Ion Gauge Delay State (IOD)

Reduces filament burnout risk by delaying gauge ON time based on pressure.

Setting Micro-Ion Gauge Delay Time (IDT)

Adds to, determines, or reads the delay time before the gauge turns ON.

Setting Micro-Ion Gauge Filament Mode (SF)

Sets the gauge to manual, alternating, or automatic filament operation mode.

Reading Micro-Ion Gauge Filament Status (RF)

Returns a character string indicating which filament is operating.

Initiating/Terminating Micro-Ion Gauge Degas (DG)

Initiates or terminates the Micro-Ion gauge degas cycle.

Reading Micro-Ion Gauge Degas Status (DGS)

Reads the current state of the Micro-Ion gauge degas cycle.

Setting Micro-Ion Gauge Degas Time (DGT)

Sets or reads the duration of the Micro-Ion gauge degas cycle.

Setting Emission Current Switch Point (SER)

Sets the pressure points for switching between low and high emission currents.

Reading Micro-Ion Gauge Emission Current (RE)

Reads the current emission mode (high or low) of the Micro-Ion gauge.

Calibrating at Atmospheric Pressure (TS)

Sends the command to calibrate the module at atmospheric pressure.

Calibrating at Vacuum Pressure (TZ)

Sends the command to calibrate the module at vacuum pressure.

Setting/Reading Atmospheric Pressure Output (ATM)

Sets or reads the pressure value indicated at zero differential.

Reading RS-485 Module Status (RS)

Reads RS-485 character strings indicating the module's operating status.

Reading Module Status Hexadecimal Bits (RSX)

Reads a 32-bit hexadecimal value indicating specific error conditions or status.

Resetting Module to Power-Up State (RST)

Resets the module to its power-up status, similar to cycling power.

Resetting to Factory Defaults (FAC)

Restores module parameters to their default factory settings.

Reading Firmware Version (VER)

Reads the internal part number and firmware version of the module.

Optional Display

Optional Display Capabilities

Describes the backlit matrix display's ability to show pressure and error conditions.

Optional Display Resolution

Explains how display resolution changes with the module's operating pressure range.

Optional Display Error Conditions

Describes how error conditions are indicated on the display and how to troubleshoot them.

Maintenance

Customer Service and Support

Provides contact information for service, troubleshooting, and returns (RMA).

Troubleshooting Precautions

Lists precautions for troubleshooting electronic components, including grounding and tool usage.

Troubleshooting Symptoms, Causes, and Solutions

Lists common symptoms, their possible causes, and recommended solutions for the module.

Troubleshooting RS-485 Error Responses

Details RS-485 error responses and provides solutions for specific error conditions.

Micro-Ion Gauge Continuity Test

Explains how to test gauge elements for open filaments or shorts using an ohmmeter.

Replacing the Gauge Assembly

Provides step-by-step instructions for safely removing and installing a new gauge assembly.

Returning Module for Service

Details the process for returning a module for factory service, including RMA requirements.

Specifications and Compliance

Pressure Measurement Specifications

Details specifications for absolute pressure, accuracy, and repeatability.

Temperature Specifications

Lists operating, storage, and bakeout temperature ranges for the module.

Outputs and Indicators

Describes available output options, analog outputs, and LED status indicator functions.

Optional Display Specifications

Details optional display capabilities, pressure range, units, and error conditions.

Optional Trip Point Relays

Specifies relay types, contact ratings, and hysteresis for vacuum and differential pressure assignments.

Micro-Ion Sensor Specifications

Details emission current, default control settings, and filament operation modes.

Conductron Heat-Loss Sensor Specifications

Describes the Conductron sensor's sensing wires.

Electrical Connectors and Power Requirements

Details I/O connector type and power supply requirements for the module.

Compliance and Certifications

Lists compliance standards for EMC, Product Safety, IP rating, and environmental factors.

Physical Specifications

Provides weight, case material, materials exposed to vacuum, and dimensions.

Theory of Operation

Module Operation Overview

Explains the four pressure measuring devices within the module and their interaction.

Auto Ranging Operation

Describes how the module automatically switches sensors based on pressure levels.

Micro-Ion Gauge Operation Principles

Explains the functional parts of the Micro-Ion gauge and how ion current relates to gas density.

Conductron Sensor Operation Theory

Explains how the Conductron sensor measures pressure using heat loss and resistance changes.

Piezo Resistive Diaphragm Sensor Operation

Explains how diaphragm sensors measure pressure and determine differential pressure.