MKS 356 Micro-Ion Plus Series User Manual (English)

Questions and Answers:

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Joshua HammondAug 1, 2025
Why is my MKS 356 Micro-Ion Plus pressure reading inaccurate?
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  Dustin CruzAug 1, 2025
  An inaccurate pressure reading on your MKS Control Unit can stem from several factors. It could be due to mechanical damage, contamination of the Micro-Ion gauge electrode structure, a vacuum leak in the chamber, or the Conductron gauge being out of calibration. If there is contamination, degas the Micro-Ion gauge or remove the gauge and sensor and bake out to 150 °C (302 °F). Calibrate the Micro-Ion Module at vacuum pressure if the Conductron gauge is out of calibration.
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William Bradley DDSAug 5, 2025
What to do if my MKS Control Unit Micro-Ion gauge will not stay on?
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  tamarastoneAug 6, 2025
  If your MKS Control Unit's Micro-Ion gauge isn't staying on, it might be due to several reasons. The vacuum chamber pressure may be too high, exceeding 2 x 10–2 Torr (2.66 x 10–2 mbar, 2.66 pascal). Ensure that you decrease the vacuum chamber pressure to less than this value. Also, if the filament is broken or mechanical damage has occurred, replace the gauge assembly. If contamination is present, degas the Micro-Ion gauge.
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Maureen ThomasAug 10, 2025
What to do if the display reads 'OFF' on my MKS Control Unit?
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  sandrawilsonAug 10, 2025
  If the display on your MKS Control Unit reads “OFF”, it could be because the gauge button has been pressed, and the Micro-Ion gauge is OFF. Turn ON the Micro-Ion gauge. Another potential cause is an open connection between pins 1 and 5 on the 15-pin connector. Check the circuit and cables.
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April StaffordAug 14, 2025
What to do if my MKS Control Unit gauge indicator does not illuminate?
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  Daniel SteeleAug 14, 2025
  If the gauge indicator on your MKS Control Unit isn't lighting up, here's what to check: * First, ensure the power supply is ON and adequate for the load. * If using a switching power supply, it may have shut down due to a current surge during power-up. Ensure the power supply can withstand the startup inrush current. * Inspect the power supply wiring for faults and replace or repair as necessary. * Verify the power supply connector is wired correctly; reconnect if needed.
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Karl HoAug 18, 2025
Why does my MKS 356 Micro-Ion Plus Control Unit display read '0.3–9' when the Micro-Ion gauge turns ON?
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  Jessica RogersAug 18, 2025
  If your MKS Control Unit displays '0.3–9' when the Micro-Ion gauge is turned on, it could be due to a coated Micro-Ion gauge collector. Perform the Micro-Ion gauge continuity test. Alternatively, the electrometer in the module may be faulty, in which case you should replace the gauge assembly.
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Kayla ValenzuelaAug 22, 2025
What to do if process control trip point does not function properly on my MKS 356 Micro-Ion Plus?
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  Robert BergerAug 22, 2025
  If the process control trip point isn't functioning correctly on your MKS Control Unit, it might be due to incorrect wiring of the trip point connector. Reconnect the wiring to the trip point connector. Another possible reason is that the trip points are set to invalid values; reconfigure the trip points.
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Christian LopezAug 27, 2025
What to do if the vacuum chamber pressure is less than 20 mTorr but the pressure display is greater than 20 mTorr and the Micro-Ion gauge will not turn ON in my MKS Control Unit?
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  ashley54Aug 27, 2025
  If the vacuum chamber pressure is less than 20 mTorr, but the pressure display reads greater than 20 mTorr, and the Micro-Ion gauge won't turn on, the Conductron sensor offset may not be set correctly (out of calibration). Calibrate the Micro-Ion Module at vacuum pressure.