MKS 356 Micro-Ion Plus Series User Manual

10 Micro-Ion
®
Module Instruction Manual - 356007-GP
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: 978-645-5500
Fax: 978-557-5100
Email: mks@mksinst.com
1.8 Definitions of Terms • Table 1-1 lists terms describing the Micro-Ion Plus Module and its
components.
1.9 Specifications
Measurement Range for Air and N
2
Measurements will change with different gases and gas mixtures. Micro-Ion
Plus gauges are not intended for use with flammable or explosive gases.
Atmospheric pressure value is based on calibration at time of use.
Torr 1 x 10
–9
Torr to atmosphere (“At”)
mbar 1 x 10
–9
mbar to atmosphere (“At”)
pascal 1 x 10
–7
pascal to atmosphere (“At”)
Micro-Ion Gauge Emission Current
Emission current 0.1 and 4 mA, autoranging
Micro-Ion gauge auto on 2 x 10
–2
Torr, 2.66 x 10
–2
mbar, 2.66 pascal, with decreasing pressure
Micro-Ion gauge auto off 3 x 10
–2
Torr, 3.99 x 1
–2
mbar, 3.99 pascal, with increasing pressure
Micro-Ion gauge degas Electron bombardment, 3.75 W with 2-minute timer
Default switch to high (4.0 mA) 5.0 x 10
–6
Torr, 6.6 x 10
–6
mbar, 6.6 x 10
–4
pascal, with decreasing pressure
Default switch to low (0.1 mA) 1 x 10
–5
Torr, 1.3 x 10
–5
mbar, 1.3 x 10
–3
pascal, with increasing pressure,
adjustable, 50% hysteresis (automatically set)
Table 1-1 Terms Describing the Micro-Ion Plus Module and Components
Term Description
Module The Micro-Ion Plus Module, which contains a hot filament Micro-Ion gauge
(Bayard-Alpert type ionization gauge) and a Conductron heat-loss sensor.
Micro-Ion gauge The Bayard-Alpert type ionization gauge, which indicates pressure by producing
a current that is proportional to gas density.
Conductron sensor The heat-loss sensor, which measures pressure as a function of heat loss through
the gold-plated tungsten sensing wire.

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English