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MKS 253B-1-40-2 User Manual

MKS 253B-1-40-2
54 pages
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118843-P1
Rev C, 2/99
Instruction Manual
MKS Type 253B
Throttling Valve
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

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MKS 253B-1-40-2 Specifications

General IconGeneral
CategoryControl Unit
TypePressure Controller
Housing MaterialAluminum
Protection ClassIP40
ModelMKS 253B-1-40-2

Summary

Chapter One: General Information

Introduction

Provides an overview of the MKS Type 253B valve and its application in vacuum systems.

How This Manual is Organized

Explains the manual's structure to help users navigate its content effectively.

Customer Support

Details MKS services, calibration, repair, and contact information for user assistance.

Safety Procedures and Precautions

DO NOT SUBSTITUTE PARTS OR MODIFY VALVE

Prohibits unauthorized part replacements or modifications to maintain safety.

SERVICE BY QUALIFIED PERSONNEL ONLY

Stipulates that only qualified personnel should perform maintenance or internal adjustments.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

Advises caution with hazardous materials, including purging and compatibility checks.

PURGE THE VALVE

Instructs users to purge the valve with clean gas after installation or before removal.

USE PROPER PROCEDURES WHEN PURGING

Specifies that purging should be done under ventilation with gloves for protection.

Chapter Two: Installation

How To Unpack the Type 253 Unit

Guide on inspecting the unit upon receipt and handling packing materials.

Interface Cables

Information on cables for connecting the 253 unit to controllers and systems.

Setup

Instructions for configuring and preparing the valve for operation.

Dimensions

Detailed physical measurements and specifications for the valve unit.

O-Ring Material

Information on O-ring material and its compatibility with system gases.

Mounting Instructions

Guidance on properly mounting the valve in a system, including orientation.

Connectors

Details about the 15-pin Type 'D' connector and its pin assignments.

Labels

Description of the pump label and serial number label on the valve unit.

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