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MKS 253B-2-2-2 User Manual

MKS 253B-2-2-2
54 pages
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118843-P1
Rev C, 2/99
Instruction Manual
MKS Type 253B
Throttling Valve
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

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MKS 253B-2-2-2 Specifications

General IconGeneral
CategoryControl Unit
Control Resolution0.1% of Full Scale
Communication InterfaceRS-232
Output Signal0-10 VDC
Response Time100 ms

Summary

MKS Type 253B Throttling Valve Instruction Manual

Valve Safety Information

Safety Procedures and Precautions

General Safety Warnings and Precautions

Key operational safety rules including warnings about moving parts, isolation, and service.

Hazardous Materials and Operational Environment

Protocols for hazardous materials, purging, operating environment, and pressure limits.

Chapter Two: Installation

Unpacking and Initial Checks

Guides on unpacking the unit, checking for damage, and obtaining an ERA number.

Interface Cables and Connections

Details on system interface cables, EMC compliance, and generic shielded cable requirements.

Connectors and Labels

Chapter Three: Operation and Theory of Operation

Safe Operation Guidelines

Safety instructions and operational considerations for using the Type 253 valve.

Chapter Four: Maintenance

General Maintenance and Cleaning

Routine checks for wear, inspection for damage, and cleaning procedures.

Appendix A: Product Specifications

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