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MKS Mini-Convectron 275 Series User Manual

MKS Mini-Convectron 275 Series
64 pages
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Mini-Convectron
®
Vacuum Gauge Module
with Nonlinear Analog Outputs and Process
Control Relays
Instruction manual part number 275513
Revision C - November 2019
Series 275
Instruction Manual
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MKS Mini-Convectron 275 Series Specifications

General IconGeneral
CategoryControl Unit
BrandMKS Instruments
ModelMini-Convectron 275 Series
Operating Temperature0 to 50°C
Storage Temperature-20 to 70 °C
Measurement Range1 x 10^-4 to 1, 000 Torr
Output Signal0-10 VDC
Weight0.45 kg
Accuracy±15% of reading from 1.00E+3 to 1.00E-3 Torr for N2

Summary

Chapter 1 Safety

Safety Introduction and Guidelines

Overview of safety warnings, symbols, and general instructions.

Grounding and High Voltage Safety

Requirements for proper grounding and hazards associated with high voltage.

Over-Pressure and Environment Precautions

Warnings about over-pressure conditions and hazardous environments.

Service, Warranty, and Compliance

Guidelines for service, warranty information, and FCC verification.

Damage Requiring Service

Conditions that necessitate professional servicing of the module.

Chapter 2 Installation

Module Components and Pressure Relief Devices

Details of module parts and importance of pressure relief devices.

Installation Procedure Steps

Step-by-step guide for installing the vacuum gauge module.

Locating, Attaching, and Wiring

Instructions for module placement, chamber connection, and electrical wiring.

Grounding and Setpoint Configuration

Procedures for grounding and configuring setpoint relays for the application.

Convectron Gauge Calibration

Steps for calibrating the Convectron gauge at different pressures.

Chapter 3 Operation

Preparing for Module Operation

Initial procedures and warnings before operating the module.

Nonlinear Analog Output and Gas Pressure Readings

Explanation of analog output and pressure readings for various gases.

Setpoint Relays: Setup and Adjustment

How to set and adjust the module's programmable setpoint relays.

Relay Status and Gauge Calibration

Methods for reading relay status and calibrating the gauge at atmospheric pressure.

Vacuum Calibration and Low Pressure Operation

Calibrating at vacuum pressure and operating the module at low pressures.

Factory Settings and Operation Tasks

Overview of factory default settings and key operational tasks.

Chapter 4 Maintenance

Customer Service and Support

Contact information and procedures for obtaining service and support.

Troubleshooting and Gauge Testing

Guidance for diagnosing issues and testing the Convectron gauge.

Gauge Removal and Replacement

Procedures for safely removing and replacing the Convectron gauge.

Appendix A Specifications

Measurement, Temperature, and Power Specs

Technical specifications for pressure measurement, temperature limits, and power requirements.

Output, Relay, and Gauge Specifications

Specifications for analog output, setpoint relays, and the Convectron gauge itself.

Physical Characteristics

Mounting, Case, Weight, and Dimensions

Details on physical attributes including mounting, case material, weight, and dimensions.

Appendix B Theory of Operation

Convectron Gauge Working Principle

Explanation of the Convectron gauge's operating principle using a Wheatstone bridge.

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