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MKS Mass-Flo 2179A User Manual

MKS Mass-Flo 2179A
88 pages
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116527-P1
Rev E, 3/99
Instruction Manual
MKS Type 1179A and 2179A
Mass-Flo
®
Controller
and
Type 179A Mass-Flo Meter
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

Questions and Answers:

MKS Mass-Flo 2179A Specifications

General IconGeneral
Operating PressureUp to 150 PSIG (10.3 barg)
Operating Temperature50 °C
Output Signal0-5 VDC
Process Connection1/4"
Wetted Materials316L stainless steel
Electrical Connections9-Pin D-Sub Connector
Weight1.1 kg (2.4 lbs)
Repeatability±0.25% of Full Scale

Summary

Mass Flow Controller Safety Information

Safety Procedures and Precautions

Do Not Substitute Parts or Modify Instrument

Prohibits unauthorized parts replacement or modifications to the instrument.

Service by Qualified Personnel Only

States that component replacement and internal adjustments must be done by qualified personnel.

Use Caution When Operating with Hazardous Materials

Advises caution when using hazardous materials and ensuring compatibility.

Purge the Instrument

Instructs to purge the unit with clean, dry gas after installation or before removal.

Do Not Operate in an Explosive Environment

Warns against operating the instrument in explosive environments unless certified.

Operate at Safe Inlet Pressures

Advises operating the unit within its rated maximum pressure limits.

Chapter One: General Information

Design Features

Details the advanced flow sensor, control valve, and optimized bypass of the 1179 flow controller.

Chapter Two: Installation

Chapter Three: Overview

Type 2179 MFC with a Positive Shutoff Valve

Describes the Type 2179's positive shutoff valve and its specifications.

Electrical Connections

Details electrical connection options for the 1179 flow controller.

The Gas Correction Factor (GCF)

Explains the Gas Correction Factor (GCF) and its use in flow rate calculations.

How To Calculate the GCF for Pure Gases

Provides the equation for calculating Gas Correction Factor for pure gases.

How To Calculate the GCF for Gas Mixtures

Details the equation for calculating GCF for gas mixtures.

Chapter Four: Operation

How To Start Up the MFC/MFM

Guides the user through the initial startup procedure for the MFC/MFM.

How To Zero the Flow Controller

Explains the procedure for setting the zero point of the flow controller.

How To Adjust the Controller Gain (MFC only)

Instructs on adjusting controller gain to reduce signal oscillation.

How To Override the Valve (MFC only)

Explains how to use the valve override feature to open or close the valve.

Chapter Six: Maintenance

Zero Adjustment

Advises checking and resetting the zero setting periodically for accuracy.

Chapter Seven: Troubleshooting

Troubleshooting Chart

Presents a chart of symptoms, possible causes, and remedies for troubleshooting.

How To Adjust the Valve Preload (MFC only)

Details the procedure for adjusting the valve preload for MFCs.

Appendix A: Product Specifications

Appendix C: Gas Correction Factors

Appendix D: MFC Sizing Guidelines

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