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MKS Mass-Flo 179A User Manual

MKS Mass-Flo 179A
88 pages
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116527-P1
Rev E, 3/99
Instruction Manual
MKS Type 1179A and 2179A
Mass-Flo
®
Controller
and
Type 179A Mass-Flo Meter
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

Questions and Answers:

MKS Mass-Flo 179A Specifications

General IconGeneral
Operating Temperature0 to 50°C
Output Signal0-5 VDC, 4-20 mA
Gas TypeVarious
Measurement RangeRanges from 0-10 SCCM to 0-1000 SLPM, consult factory
Accuracy+/- 1% of Full Scale
Operating PressureUp to 150 psig
Materials of Construction316L Stainless Steel, Viton
Electrical ConnectionsD-sub connector
Process Connections1/4 inch VCR or Swagelok

Summary

MKS Flow Controller Safety

General Safety Procedures and Precautions

Essential safety rules for operation, installation, and handling.

Installation and Setup Procedures

Interface Cables and Controller Setup

Details on MKS cables, connectors, and setup guidelines.

Operational Overview and Gas Correction Factors

Type 2179 MFC and Electrical Connections

Overview of the 2179 MFC and details on electrical connections.

Understanding and Calculating Gas Correction Factors (GCF)

Explains GCF, its calculation for pure gases, mixtures, and temperature adjustments.

Operation, Theory, and Maintenance

Startup, Zeroing, and Gain Adjustment

Procedures for starting up, zeroing, and adjusting the controller gain.

Troubleshooting and Valve Adjustment

Troubleshooting Common Issues

Provides a troubleshooting chart for symptoms, causes, and remedies.

Adjusting Valve Preload on MFC

Detailed steps for adjusting the valve preload for proper operation.

Product Specifications

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