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MKS Mass-Flo 179A - User Manual

MKS Mass-Flo 179A
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116527-P1
Rev E, 3/99
Instruction Manual
MKS Type 1179A and 2179A
Mass-Flo
®
Controller
and
Type 179A Mass-Flo Meter
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

Questions and Answers

  • V
    Vickie VegaAug 9, 2025
    What to do if MKS Mass-Flo 179A show no output at zero?
    • G
      grosswilliamAug 9, 2025
      If your MKS Measuring Instruments unit shows no output or overrange at zero after warming up, first check the cable type. If the cable is correct, ensure the valve override function is disconnected. If the issue persists, it may indicate an electronics malfunction, requiring the unit to be returned for service.
  • R
    Rebecca MorganAug 15, 2025
    Why is my MKS Mass-Flo 179A Measuring Instruments oscillating?
    • G
      Gary WhiteAug 15, 2025
      If your MKS Measuring Instruments exhibit oscillation, it might be due to a controller gain setting that's too high. Try reducing the gain by turning it counter-clockwise. Also, verify that the upstream pressure regulator meets the manufacturer's specifications and that the upstream pressure isn't excessively high. If it is, reduce the upstream pressure.
  • A
    Amanda GreenAug 21, 2025
    What to do if MKS Measuring Instruments unit does not achieve full flow?
    • M
      Miguel RussellAug 21, 2025
      If your MKS Measuring Instruments unit does not achieve full flow, the upstream pressure might be too low. Try increasing the upstream pressure. Alternatively, excessive valve preload could be the cause.
  • K
    kayla61Aug 27, 2025
    Why does my MKS Measuring Instruments unit indicate a negative flow?
    • J
      Jeremiah FullerAug 27, 2025
      If your MKS Measuring Instruments unit indicates a negative flow, it is likely that the unit was installed backwards in the gas stream. Reinstall the unit in the proper flow direction.
  • U
    umeyerSep 1, 2025
    What to do if MKS Mass-Flo 179A Measuring Instruments controller does not function?
    • G
      Gary JonesSep 1, 2025
      If the controller of your MKS Measuring Instruments does not function, this could be due to an electronics malfunction, requiring the unit to be returned for service. Another possibility is a valve sticking.

Summary

MKS Flow Controller Safety

General Safety Procedures and Precautions

Essential safety rules for operation, installation, and handling.

Installation and Setup Procedures

Interface Cables and Controller Setup

Details on MKS cables, connectors, and setup guidelines.

Operational Overview and Gas Correction Factors

Type 2179 MFC and Electrical Connections

Overview of the 2179 MFC and details on electrical connections.

Understanding and Calculating Gas Correction Factors (GCF)

Explains GCF, its calculation for pure gases, mixtures, and temperature adjustments.

Operation, Theory, and Maintenance

Startup, Zeroing, and Gain Adjustment

Procedures for starting up, zeroing, and adjusting the controller gain.

Troubleshooting and Valve Adjustment

Troubleshooting Common Issues

Provides a troubleshooting chart for symptoms, causes, and remedies.

Adjusting Valve Preload on MFC

Detailed steps for adjusting the valve preload for proper operation.

Product Specifications

MKS Mass-Flo 179A Specifications

General IconGeneral
Operating Temperature0 to 50°C
Output Signal0-5 VDC, 4-20 mA
Gas TypeVarious
Measurement RangeRanges from 0-10 SCCM to 0-1000 SLPM, consult factory
Accuracy+/- 1% of Full Scale
Operating PressureUp to 150 psig
Materials of Construction316L Stainless Steel, Viton
Electrical ConnectionsD-sub connector
Process Connections1/4 inch VCR or Swagelok

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