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MKS Mass-Flo 1179A User Manual

MKS Mass-Flo 1179A
88 pages
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116527-P1
Rev E, 3/99
Instruction Manual
MKS Type 1179A and 2179A
Mass-Flo
®
Controller
and
Type 179A Mass-Flo Meter
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

Questions and Answers:

MKS Mass-Flo 1179A Specifications

General IconGeneral
Accuracy±1% of Full Scale
Repeatability±0.25% of Full Scale
Gas TypeVarious (depends on configuration)
Response Time<1 second
Operating Temperature0 to 50°C
Operating PressureUp to 150 psig (consult factory for specific pressure requirements)
Power Supply±15 VDC
Output Signal0-5 VDC
Process Connection1/4"
Wetted Materials316L Stainless Steel
Connections1/4 inch compression fitting

Summary

MKS Mass-Flo Controller and Meter Manual

Safety Information and Symbols

General Safety Precautions

Essential safety precautions to be followed during all phases of instrument operation.

Safety Procedures and Precautions

General Operational Safety

Essential safety precautions to be followed during all phases of instrument operation.

Hazardous Material Handling

Precautions for using hazardous materials with the instrument, including purging procedures.

Operational Safety Guidelines

Instrument Setup Procedures

Gas Line Connections and Mounting

Connecting Gas Supply and Tubing

Instructions for connecting gas supply and downstream tubing to the flow controller's inlet and outlet.

Connector Pinouts and Grounding

9-Pin Type 'D' Connector Pinout

Details the pin assignments for the 9-pin Type 'D' connector used with mass flow controllers.

Edge Card Connector Details

20-Pin Edge Card Connector Pinout

Provides the pinout for the 20-pin Edge Card connector used with mass flow controllers.

15-Pin Type 'D' Connector Information

15-Pin Type 'D' Connector Pinout

Details the pin assignments for the 15-pin Type 'D' connector used with mass flow controllers.

Gas Correction Factor (GCF)

Purpose of Gas Correction Factor

Explains the purpose of Gas Correction Factor (GCF) for accurate flow measurement of different gases.

Calculating GCF for Pure Gases

Provides the formula and parameters for calculating the GCF for pure gases.

Gas Correction Factor Calculations

GCF for Gas Mixtures

Presents the equation for calculating GCF for gas mixtures, including fractional flows and correction factors.

GCF Examples and Temperature Correction

GCF Calculation Example: Argon/Nitrogen

Illustrates GCF calculation for a gas mixture of argon and nitrogen.

Instrument Identification and Control Valve

Control Valve Operation (MFC Only)

Explains the operation of the control valve in the 1179 controller, noting it is normally closed.

Chapter Four: Operation

MFC/MFM Startup Procedure

Step-by-step guide for starting up the Mass Flow Controller/Meter, including leak testing and power application.

Flow Controller Zeroing Procedure

Steps for Zeroing the Controller

Detailed steps for zeroing the flow controller, ensuring no gas flow is present.

Controller Gain Adjustment

Adjusting Controller Gain for Stability

Guidance on adjusting controller gain to reduce flow signal oscillation and improve response.

Valve Control and Command Priority

Valve Override Functionality

Explains how to override the control valve to open or close it independently of the set point.

Control Circuitry and Valve Actuation

Controller Circuit Operation

Explains how the controller uses measurement, PID algorithm, and error voltage to control the valve.

Chapter Six: Maintenance

Zero Adjustment for Accuracy

Provides instructions for checking and resetting the zero setting for optimal accuracy and repeatability.

Instrument Repair and Service

Contacting MKS for Difficulties

Instructs users to contact MKS Sales Offices or Calibration Centers for difficulties or problems.

Chapter Seven: Troubleshooting

Troubleshooting Chart Overview

Presents a chart of common symptoms, their possible causes, and suggested remedies for MFC/MFM issues.

Valve Preload Adjustment Procedures

Safety Precautions for Valve Adjustment

Emphasizes purging with inert gas and using safe gas during valve preload adjustments.

Valve Preload Adjustment Steps

Initial Setup for Adjustment

Details steps for powering down, removing the cover, and purging the unit with safe gas.

Safe Gas Usage Mandate

Reinforces the mandatory use of safe gas during valve adjustments to prevent exposure to hazardous gases.

Valve Preload Adjustment Execution

Setting Gas Supply and Isolation Valves

Instructions on setting gas supply regulator and closing system isolation valves.

Centershaft and Jam Nut Adjustment

Guides on holding the centershaft and loosening the jam nut for adjustment.

Valve Preload Adjustment Monitoring

Turning Centershaft and Monitoring Current

Explains how to turn the centershaft while monitoring DMM for target current, with adjustment notes.

Verifying Valve Closed Conductance

Steps for checking valve closed conductance against specification after adjustment.

Valve Current Limit Adjustment

Adjusting Current Limit Potentiometer R85

Details how to find and adjust the current limiting potentiometer R85 on the PC board.

Appendix C: Gas Correction Factors

Flow Controller Range Selection

Valve Configuration Selection Criteria

Valve Configuration Selection Guide

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