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MKS Mass-Flo 1179A - Reliability; Cleanliness Features

MKS Mass-Flo 1179A
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Introduction Cha
p
ter One: General Information
18
electronics feature optional pin-to-pin compatibility with other manufacturers flow controllers.
In addition, the variable valve control electronics provides for fast response to any set point.
Reliability
To help provide excellent reliability, the design contains a low mechanical and electronic
components count and has successfully passed the following tests:
STRIFE, including temperature cycling and vibration (sine and random tests)
and with an overall metal braided shielded cable, properly grounded at both ends:
CE Compliance - EMC Directive 89/336/EEC (units with a Type D connector only;
the Edge Card connector is not CE compliant)
Cleanliness Features
With only three elastomeric external seals, the design of the flow controller ensures extremely
low external leakage and minimizes a key source of particle generation, outgassing, and
permeation. The design also incorporates minimal wetted surface area. To further ensure its
cleanliness, the 1179 controller undergoes precision machining as well as a proprietary cleaning
process. The instrument is assembled and double-bagged under Class 100 conditions.

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