MKS Mass-Flo 1179A - Environmental Specifications; Electrical Specifications

Environmental Specifications A
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endix A: Product S
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ecifications
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Environmental Specifications
Storage Humidity Range 0 to 95% relative humidity, non-condensing
Operating Temperature 0° to 50° C (32° to 122° F)
Storage Temperature -20° to 50° C (-4° to 122° F)
Electrical Specifications
Connector Options 9-pin Type “D”, 15-pin Type “D” 20-pin Edge
Card, Digital RS-485, Digital DeviceNet
Input Voltage/Current Required
Maximum at Start Up (first 5 seconds)
6
Typical at Steady State
±15 VDC (±5%) @ 200 mA
±15 VDC (±5%) @ 100 mA
Output Impedance < 1 ohm
Output Signal/Minimum Load 0 to 5 VDC into > 10K ohm
Set Point Command Signal (MFC only) 0 to 5 VDC from < 20K ohm
6
Add 100 mA to start up current if the valve is energized.