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MKS 903 Series User Manual

MKS 903 Series
40 pages
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Inverted Magnetron Cold Cathode
Ionization Vacuum Sensor
Instruction manual part number 109030026
Revision B - May 2020
Series 903
Instruction Manual

Questions and Answers:

MKS 903 Series Specifications

General IconGeneral
BrandMKS
Model903 Series
CategoryMeasuring Instruments
LanguageEnglish

Summary

Series 903 Inverted Magnetron Cold Cathode Ionization Vacuum Sensor

General Information

Receiving Inspection, International Shipment, Warranty, Certification

Covers inspection, international shipping, warranty, and product certification details.

General Information Continued

Customer Service / Technical Support

Instructions for on-site correction and factory service via RMA.

Safety

Safety Introduction & Alert Symbols

Introduction to safety, definitions of alert symbols (DANGER, WARNING, CAUTION, NOTICE).

Safety Continued

Customer Responsibility & Operational Precautions

Customer responsibilities and safety precautions for operation and service.

Safety Continued

Grounding Requirements

Detailed requirements for gauge and system grounding for safe operation.

Safety Continued

High Voltage Hazards

Hazards associated with high voltage, including shock and fire risks.

Safety Continued

Over Pressure Conditions Warnings

Warnings and precautions regarding explosive environments and high pressures.

Safety Continued

Damage Requiring Service

Conditions indicating product damage and the need for qualified service.

Specifications

General Description, Intended Use, Transportation & Storage

Covers general description, intended use, and guidelines for transport and storage.

Specifications Continued

Detailed Specifications

Detailed performance and physical specifications for the Series 903 Transducer.

Specifications Continued

Physical Dimensions

Diagrams and measurements showing the physical dimensions of the sensor.

Installation

Transducer Location & Vacuum System Connection

Placement recommendations and mounting instructions to the vacuum system.

Installation Continued

Electrical Connections & Wiring

Connecting the transducer to the controller via a 9-pin D-sub connector.

Operation

Introduction & Applications

Introduction to the Series 903 sensor and its typical applications.

Operation Continued

Theory of Cold Cathode Sensor

Explanation of the operating principles and advantages of cold cathode sensors.

Operation Continued

Starting & Reading Pressure

Procedures for starting the sensor and reading pressure using voltage.

Operation Continued

Voltage to Pressure Conversion & Vacuum Indicator

Formula for voltage-to-pressure conversion and vacuum indicator operation.

Operation Continued

Venting, A/D Converter & Using Other Gases

Covers venting, A/D converter use, and measuring pressure of other gases.

Operation Continued

Calibrating for Other Gases

Procedure for calibrating the sensor for gases other than air or nitrogen.

Service & Maintenance

Service Introduction & Guidelines

Introduction to service procedures and precautions for handling static-sensitive parts.

Service & Maintenance Continued

Damage Requiring Service

Conditions indicating product damage and the need for qualified service.

Service & Maintenance Continued

Troubleshooting, Sensor Inspection & Disassembly

Covers troubleshooting, sensor inspection, and disassembly procedures.

Service & Maintenance Continued

Sensor Cleaning & Assembly

Procedures for cleaning sensor components and reassembling them.

Service & Maintenance Continued

Accessories and Spare Parts

List of available accessories and spare parts with their corresponding part numbers.

Service & Maintenance Continued

Bakeout, Leak Detection & Customer Support

Covers sensor bakeout, leak detection, and customer support contact details.

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