MKS 903 Series User Manual

3 Specifications
16
Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
3.5 Specifications
(1) Measurements will change with different gases and mixtures. Correction parameters must be used for
gases other than N2 or Air.
(2) 150 mV is equivalent to a change in pressure of 1.41 (or 10
0.150
) times the set point, e.g., if the LED is set
to come ON at 2.0 x 10
-6
Torr (4.301 V), it will turn OFF at 2.82 x 10
-6
Torr (4.451 V).
Table 3-1 Specifications for the Series 903 Transducer
Parameter Specification
Performance
Measurement Range for N
2
/ Air
(1)
Do NOT use this product with
flammable or explosive gases.
Torr: 3.0 x 10-10 to 5.0 x 10-3
mbar: 3.9 x 10-10 to 6.5 x 10-3
Pascal:3.9 x 10-8 to 6.5 x 10-1
Vacuum Range Indicator Torr: 1.0 x 10-9 to 1.0 x 10-3
mbar: 1.3 x 10-9 to 1.3 x 10-3
Pascal: 1.3 x 10-7 to 1.3 x 10-1
Repeatability +/- 5% operating
Vacuum status Hysteresis 150 mV*
Calibration Gas Air/nitrogen
Operating Power 14 to 30 VDC, 150 mA maximum
Internal Operating Voltage 4 kV maximum, current limited to 133
μ A
Output Voltage 0.5 to 7.7 VDC, linear output,
30 Ω maximum output impedance
Output Load 100 kΩ nominal, 10 kΩ minimum
Physical
Display LED indicators for Vacuum (red), high voltage (yellow), and power
(green
Vacuum Connection KF 25, KF 40, 2¾" CF (rotatable), 1" tubing
Electrical Connection 9 pin sub-miniature “D” type
Case Material ABS plastic, UL 94-5V flame rating (with conductive coating)
Materials exposed to vacuum SS 304, SS 302, aluminum, glass, Inconel® X-750, alumina
ceramic
Weight (with CF Flange) 2.3 lb (1.04 kg)
Dimensions (W x D x H) 5" x 3" x 4.2" (127 mm x 76 mm x 108 mm)
Internal volume 0.9 in.3 (15.0 cm3) maximum
Mounting Orientation Any. However, avoid mounting the gauge directly below the
chamber to prevent sputtered material or other debris falling into
the gauge.
Operating Temperature 0° to 50°C (32° to 122°F) ambient, indoor use only, ordinary
protection from moisture
Operation Humidity 0 to 90%
Altitude 2000 m (6561 ft) maximum
Bake out Temperature 400°C (752°F) maximum for CF flanged unit; without electronics,
cable, or magnet
Specifications and dimensions are subject to change without notice.

MKS 903 Series Specifications

General

Brand	MKS
Model	903 Series
Category	Measuring Instruments
Language	English