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MKS Microvision2 User Manual

MKS Microvision2
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Microvision2
Hardware Manual
Microvision2 Hardware Manual - SP101015.102
August 2010
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MKS Microvision2 Specifications

General IconGeneral
BrandMKS
ModelMicrovision2
CategoryMeasuring Instruments
LanguageEnglish

Summary

EC Declaration of Conformity

Overview

Features

Lists key technical features and capabilities of the Microvision2 RGA.

Operation

Describes the different modes of operation for the Microvision2, including host computer and web browser control.

1. Specifications

1.1 Mechanical

Details physical dimensions and weight for the Microvision2, power supply, and analyser.

1.2 Electrical

Specifies power supply voltage, frequency, installation category, fuses, and insulation class.

1.3 Environmental

Outlines operating temperature, humidity, pollution degree, and enclosure protection ratings.

1.4 Safety

Covers safety precautions, protective earth connection, and non-user-serviceable parts.

1.5 Connectors

Describes requirements for external circuits, accessory ports, and power supply connections.

1.6 Warning Labels

Explains warning labels related to hazardous voltages and tuning adjustment holes.

1.7 Ventilation

Specifies ventilation requirements and clearance for the unit.

Additional Installation, Maintenance, and Operating Instructions

Installation Procedures

Details required procedures for safe and compliant installation, including earthing and cable routing.

Operation Guidelines

Covers authorized use, adherence to manuals, and limitations on adjustments.

Maintenance Precautions

Warns about dangerous voltages, requires competent persons for maintenance, and specifies returning faulty units.

4. Rear Panel Connections

4.1 X-Trip Connector

Describes the X-Trip connector for protecting filaments and electron multiplier from high pressures.

Indicators and Audio Socket

Covers audio socket, emission, multiplier, and power indicators.

4.6 Gauge Connector

Describes the 9-way D-type socket for interfacing with a total pressure gauge.

4.7 Power Connector

Details the 2-pin D-type connector for the 24VDC power supply.

4.8 Analogue I/O Connector

Details the 15-way D-type socket for interfacing with external equipment, including analog outputs and inputs.

4.9 Digital I/O Connector

Describes the 25-way D-type socket for external equipment, alarm signals, and trip signals.

4.10 Ethernet

Covers the RJ45 connector for connecting the Microvision2 to a network.

4.11 External Multiplier Protection

Explains external protection for the multiplier using the Digital IO connection.

5. Analyser Installation

5.1 Unpacking

Provides instructions for checking received items for damage and completeness.

5.2 Inspecting the Analyser

Details how to handle and inspect the analyser for contamination and physical damage.

5.3 Installing the Analyser

Specifies requirements for vacuum chamber flanges and mounting locations for the analyser.

5.4 Checking System Pressure

Warns about operating pressure limits to prevent damage to filaments and the ion source.

5.5 Mounting the Analyser

Explains how to seal the analyser flange to the vacuum chamber using gaskets and bolts.

6. Microvision2 Installation

6.1 Installation

Guides on physically connecting the Microvision2 unit to the analyser, ensuring proper alignment and connection.

6.2 Electrical Connections

Details connecting the power supply, X-Trip, and other ports, and cable routing advice.

7. Connecting to the Ethernet Port

7.1 Adding to Existing Network

Explains how to connect the Microvision2 to networks using Auto-IP, DHCP, or BOOTP.

7.2 Direct Connection

Guides on connecting the Microvision2 directly to a PC or MAC using an Ethernet cable.

7.3 Assigning Static IP Address

Provides instructions for configuring a fixed IP address for the Microvision2 using RGA Device Manager.

8. Baking

9. Analyser Maintenance

9.1 Overview

Introduces the analyser's functional areas: ion source, quadrupole filter, detector, and flanged housing.

9.2 Ohmmeter Analyser Checks

Describes using an ohmmeter to check for short circuits or open circuits in the analyser.

9.3 Checking Filaments

Explains how the Microvision2 monitors filament status and how to diagnose filament failures.

9.4 Changing Filaments

Provides a list of tools and the procedure for removing and replacing filaments in the ion source.

9.5 Ion Source Cleaning

Details methods for cleaning the ion source, both while fitted and after removal.

10. Exploded Views

Analyser Pin-outs

Illustrates the pin connections for the analyser feedthrough with descriptions.

11. Spare Parts

Filaments

Lists part numbers for replacement filaments based on ion source type.

Ion Source

Lists part numbers for replacement ion sources based on filter type and ion source type.

12. Returning Your Unit for Service

Support Contact Numbers

Provides contact phone numbers for service in Europe and the USA.

RETURNS FORM

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