MKS Instruments UK Ltd
Microvision2 Hardware Manual – SP101015.102 August 2010
46
11. Spare Parts
Spare parts for your quadrupole analyser are available from your local MKS Instruments sales office under
the part numbers detailed below.
Filaments are supplied in pairs, either on a single plate or on two plates depending on the analyser.
Replacement ion sources are supplied complete with filaments.
Filaments
Ion source
type
Tungsten Thoriated
Iridium
Open and UHV 842-023 842-024
PVD 842-060 842-002
Ion source
Filter type Ion source
type
Tungsten Thoriated
Iridium
2” Single Open 842-021 842-022
4” Single Open 842-021 842-022
Double / Triple Open 842-042 842-043
5” Single UHV 842-036 842-035
Triple UHV 842-046 842-044
Any filter type PVD 842-045 842-047
Any filter type CVD 842-052 842-053
If you require a spare part not mentioned above, please contact your local MKS Instruments office for help
on obtaining a part number.
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