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MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

9.4 Changing filaments

All our analysers are fitted with dual filaments, an Open Ion-source analyser has both filaments mounted on

a single plate, a PVD/CVD Ion-source has two plates, with one filament mounted on each plate.

Changing filaments is the most common maintenance event with quadrupole analysers. For this reason the

MKS analyser has been designed to make this task as quick and easy as possible.

Below is a list of the tools and equipment you will require. We recommend that you assemble the following

items before you start. Remember that the instrument is supplied with a tool kit that contains some of the

things you will need;

small jewelers screwdriver (2mm)

pair of tweezers

small pair of smooth jawed needle nosed pliers

pair of clean cotton gloves

clean bench on which to work

Ohmmeter

clean container in which to put small parts

replacement filament

a method of holding the analyser securely in an upright position, (a small bench vice is ideal).

pen and paper on which to make notes and sketches

9.4.1 Removing the filaments

Open ion source

1. Remove the analyser from the vacuum system making sure that you do not touch the exposed internal

surfaces and place it on the bench in an upright position.

2. The filaments are located on the very top of the analyser, retained by two M2 x4 pan head screws. The

electrical connections are made via three barrel connectors, one to each filament and one to filament

common, see Fig.1.

3. Hold the barrel connectors highlighted in orange firmly with your pliers and slacken the screws

highlighted in red until the barrel connector can be removed from the filament plate and the connecting

lead, see Fig.2.

4. Remove the two M2 x4 pan head screws highlighted in red holding the filament plate in place, see

Fig.3.

5. Remove the filament plate assembly. Carry out this step carefully so as not to damage the filaments or

source cage, see Fig.4.

Refer to the views on the following page.

MKS Microvision2 User Manual

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