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MKS RGA Series User Manual

MKS RGA Series
32 pages
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A1355A
RGA Series
Low profile fast rotation stage
USERS M
ANUAL

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MKS RGA Series Specifications

General IconGeneral
CategoryResidual Gas Analyzer
Power Requirements100-240 VAC, 50/60 Hz
Mass Range1-100 amu, 1-200 amu
Detector TypeFaraday Cup
Applicationsleak detection, gas analysis
Resolution0.5 amu
Ionization Energy70 eV
Digital InterfaceEthernet, RS-232, RS-485

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