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General| Category | Residual Gas Analyzer |
|---|---|
| Power Requirements | 100-240 VAC, 50/60 Hz |
| Mass Range | 1-100 amu, 1-200 amu |
| Detector Type | Faraday Cup |
| Applications | leak detection, gas analysis |
| Resolution | 0.5 amu |
| Ionization Energy | 70 eV |
| Digital Interface | Ethernet, RS-232, RS-485 |
Lists detailed technical specifications for the RGA150 stage.
Details the stage's load capacity and stiffness properties.
Specifies requirements for mounting surfaces for optimal stage performance.
Safety warnings and precautions for connecting controllers.
Instructions for connecting the stage to the controller.
Details on setting stage parameters for optimal performance.
Guidance on handling stage malfunctions and repair procedures.
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