MKS RGA Series - Default Chapter; Table of Contents

RGA Series Low profile fast rotation stage
iii A1355A0 – EDH0427En1010 – 04/21
Table of Contents
Waranty .......................................................................................................... ii
EU Declaration of Conformity ....................................................................... v
UK Declaration of Conformity ...................................................................... vi
Definitions and Symbols .............................................................................. vii
Warnings ..................................................................................................... viii
Cautions .......................................................................................................... x
1.0 Introduction ............................................................................................. 1
2.0 Description ............................................................................................... 2
2.1 Design Details ................................................................................................ 3
3.0 Characteristics ......................................................................................... 4
3.1 Definitions ...................................................................................................... 4
3.2 Mechanical specifications .............................................................................. 6
3.3 Load Characteristics and Stiffness ................................................................. 6
3.4 Weights ........................................................................................................... 7
4.0 Drives and Motors ................................................................................... 7
4.1 Motor Characteristics ..................................................................................... 7
4.2 Sensors............................................................................................................ 7
4.3 Position Feedback Signals .............................................................................. 8
4.4 Pinouts ............................................................................................................ 8
4.4.1 Motor Connector ..................................................................................... 8
4.4.2 Encoder Connector ................................................................................. 8
5.0 Installation ............................................................................................... 9
5.1 Unpacking ...................................................................................................... 9
5.2 Setting up ........................................................................................................ 9
5.3 Mounting conditions ..................................................................................... 10
5.4 Grounding ..................................................................................................... 10
6.0 Connection to Newport Controllers ..................................................... 11
6.1 Warnings on Controllers............................................................................... 11
6.2 Cables ........................................................................................................... 12
6.2.1 Motor cable (MCAB-5-B) .................................................................... 12
6.2.2 Encoder cable (E5775A) ....................................................................... 13
6.2.3 Longer cables ........................................................................................ 13
6.3 Connection.................................................................................................... 13
6.4 Configuration ................................................................................................ 14