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Spectra-Physics InSightX3
MKS Spectra-Physics InSightX3 - User Manual
9 pages
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MKS INS
TRUMENTS, I
NC.
SPECTRA-PHYSICS LA
SERS
3635 PETERSON W
AY • SANTA
CLARA, CA 95054
-
28
09 • USA
P: +1.408.
980
.
4300
WWW.MKSINST.
COM
•
WWW.SP
ECTRA-PHYSICS.COM
Pre-Installation Guide
InSight
®
X3
TM
2
Table of Contents
Main Page
Installation Location and Environment
3
Physical Description
3
Environmental Requirements
3
Utility Requirements
4
Computer Requirements
5
Pre-Installation Checklist
6
When the System Arrives
7
Laser Safety Considerations
7
Maintenance
8
General Procedures
9
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MKS Spectra-Physics InSightX3 Specifications
General
Brand
MKS
Model
Spectra-Physics InSightX3
Category
Measuring Instruments
Language
English
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